Inventor
YAMAGUCHI YOKO
JP26 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGUCHI YOKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
13 patentsUS6921724B2Jul 26, 2005
Variable temperature processes for tunable electrostatic chuck
LAM RES CORP102 citations97
US6344105B1Feb 5, 2002
Techniques for improving etch rate uniformity
LAM RES CORP141 citations97
US9991128B2Jun 5, 2018
Atomic layer etching in continuous plasma
LAM RES CORP26 citations93
US10446394B2Oct 15, 2019
Spacer profile control using atomic layer deposition in a multiple patterning process
LAM RES CORP8 citations84
US9741563B2Aug 22, 2017
Hybrid stair-step etch
LAM RES CORP10 citations80
US7361607B2Apr 22, 2008
Method for multi-layer resist plasma etch
LAM RES CORP8 citations74
US9640371B2May 2, 2017
System and method for detecting a process point in multi-mode pulse processes
LAM RES CORP2 citations72
US10242849B2Mar 26, 2019
System and method for detecting a process point in multi-mode pulse processes
LAM RES CORP1 citations62
US9230825B2Jan 5, 2016
Method of tungsten etching
LAM RES CORP2 citations60
US12217955B2Feb 4, 2025
Method for etching features using a targeted deposition for selective passivation
LAM RES CORP0 citations57
US11742212B2Aug 29, 2023
Directional deposition in etch chamber
LAM RES CORP0 citations56
USRE47650EOct 15, 2019
Method of tungsten etching
LAM RES CORP0 citations50
US10763142B2Sep 1, 2020
System and method for determining field non-uniformities of a wafer processing chamber using a wafer processing parameter
LAM RES CORP0 citations38