Inventor · disambiguated record
Robert Franken
Also filed as: FRANKEN ROBERT · FRANKEN ROBERT KAREL
3 granted patents·130 citations·filing 1995–2009
70Inventor score
Top patents by PatentIndex Score
3 records- 0194US5741422AMolten metal filter cartridgeMETAULLICS SYSTEMS CO LP·Filed 1995·Granted Apr 21, 1998·125 cites·14 claims
- 0274US7869022B2Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring systemASML NETHERLANDS BV·Filed 2007·Granted Jan 11, 2011·4 cites·17 claims
- 0348US8208118B2Method for determining exposure settings, lithographic exposure apparatus, computer program and data carrierBURRY DAVID WARREN·Filed 2009·Granted Jun 26, 2012·1 cites·12 claims
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