Inventor
BANGERT STEFAN
DE33 patents
⚠️ This page may combine multiple inventors who share the name “BANGERT STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
18 patentsUS7710671B1May 4, 2010
Laminated electrically tintable windows
APPLIED MATERIALS INC140 citations97
US10837111B2Nov 17, 2020
Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier
APPLIED MATERIALS INC3 citations70
US9899635B2Feb 20, 2018
System for depositing one or more layers on a substrate supported by a carrier and method using the same
APPLIED MATERIALS INC6 citations69
US12060634B2Aug 13, 2024
Roller for transporting a flexible substrate, vacuum processing apparatus, and method of cooling a roller
APPLIED MATERIALS INC0 citations61
US12049691B2Jul 30, 2024
Temperature-controlled shield, material deposition apparatus and method for depositing a material onto a substrate
APPLIED MATERIALS INC0 citations61
US11732345B2Aug 22, 2023
Vapor deposition apparatus and method for coating a substrate in a vacuum chamber
APPLIED MATERIALS INC1 citations61
US11906087B2Feb 20, 2024
Flanged joint and method of fluidly connecting two components
APPLIED MATERIALS INC1 citations56
US10199660B2Feb 5, 2019
Shadow mask alignment and management system
APPLIED MATERIALS INC0 citations52
US9350040B2May 24, 2016
Methods of and factories for thin-film battery manufacturing
APPLIED MATERIALS INC0 citations52
US12286703B2Apr 29, 2025
Evaporation apparatus, vapor deposition apparatus, and evaporation method
APPLIED MATERIALS INC0 citations51
US9905723B2Feb 27, 2018
Methods for plasma activation of evaporated precursors in a process chamber
APPLIED MATERIALS INC1 citations51
US9450135B2Sep 20, 2016
Plasma enhanced thermal evaporator
APPLIED MATERIALS INC1 citations51
US11905589B2Feb 20, 2024
Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrate
APPLIED MATERIALS INC0 citations50
US11713506B2Aug 1, 2023
Evaporator, deposition arrangement, deposition apparatus and methods of operation thereof
APPLIED MATERIALS INC0 citations50
US11718904B2Aug 8, 2023
Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber
APPLIED MATERIALS INC0 citations49
US10483465B2Nov 19, 2019
Methods of operating a deposition apparatus, and deposition apparatus
APPLIED MATERIALS INC0 citations47
US10546732B2Jan 28, 2020
Sputter deposition source, apparatus for sputter deposition and method of assembling thereof
APPLIED MATERIALS INC0 citations39
US12203164B2Jan 21, 2025
Material deposition apparatus, method of depositing material on a substrate, and material deposition system
APPLIED MATERIALS INC0 citations35
APPLIED MATERIALS GMBH & CO KG
4 patentsUS7479189B2Jan 20, 2009
Coating plant with a charging lock and device therefor
APPLIED MATERIALS GMBH & CO KG2 citations60
US7837799B2Nov 23, 2010
Arrangement for transporting a flat substrate in a vacuum chamber
APPLIED MATERIALS GMBH & CO KG6 citations59
US7153367B2Dec 26, 2006
Drive mechanism for a vacuum treatment apparatus
APPLIED MATERIALS GMBH & CO KG6 citations58
US7575662B2Aug 18, 2009
Method for operating a sputter cathode with a target
APPLIED MATERIALS GMBH & CO KG0 citations42