Inventor
CHOI BONG
KR3 patents
Patents
3 patentsUS6695680B2Feb 24, 2004
Polishing pad conditioner for semiconductor polishing apparatus and method of monitoring the same
SAMSUNG ELECTRONICS CO LTD33 citations89
US7086132B2Aug 8, 2006
Method for assembling a polishing head and apparatus for detecting air leakage in the polishing head while assembling the same
SAMSUNG ELECTRONICS CO LTD4 citations55
US6754942B2Jun 29, 2004
Method for assembling a polishing head and apparatus for detecting air leakage in the polishing head while assembling the same
SAMSUNG ELECTRONICS CO LTD1 citations44