Inventor
KIHARA HIDEKI
JP31 patents
⚠️ This page may combine multiple inventors who share the name “KIHARA HIDEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
19 patentsUS6646233B2Nov 11, 2003
Wafer stage for wafer processing apparatus and wafer processing method
HITACHI HIGH TECH CORP89 citations98
US7138606B2Nov 21, 2006
Wafer processing method
HITACHI HIGH TECH CORP53 citations96
US7828928B2Nov 9, 2010
Vacuum processing apparatus
HITACHI HIGH TECH CORP10 citations92
US7335277B2Feb 26, 2008
Vacuum processing apparatus
HITACHI HIGH TECH CORP24 citations92
US7247207B2Jul 24, 2007
Vacuum processing apparatus
HITACHI HIGH TECH CORP11 citations92
US6895179B2May 17, 2005
Wafer stage for wafer processing apparatus
HITACHI HIGH TECH CORP37 citations92
US6825617B2Nov 30, 2004
Semiconductor processing apparatus
HITACHI HIGH TECH CORP37 citations92
US7416633B2Aug 26, 2008
Plasma processing apparatus
HITACHI HIGH TECH CORP9 citations84
US7353076B2Apr 1, 2008
Vacuum processing method and vacuum processing apparatus
HITACHI HIGH TECH CORP14 citations80
US7833429B2Nov 16, 2010
Plasma processing method
HITACHI HIGH TECH CORP7 citations74
US7740739B2Jun 22, 2010
Plasma processing apparatus and method
HITACHI HIGH TECH CORP5 citations74
US7674351B2Mar 9, 2010
Plasma processing apparatus
HITACHI HIGH TECH CORP3 citations63
US7183715B2Feb 27, 2007
Method for operating a semiconductor processing apparatus
HITACHI HIGH TECH CORP2 citations63
US7833382B2Nov 16, 2010
Vacuum processing apparatus
HITACHI HIGH TECH CORP1 citations62
US7296783B2Nov 20, 2007
Vacuum processing apparatus
HITACHI HIGH TECH CORP2 citations60
USD546354SJul 10, 2007
Semiconductor manufacturing apparatus
HITACHI HIGH TECH CORP4 citations57
US7976632B2Jul 12, 2011
Vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations52
US11482435B2Oct 25, 2022
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations47
US7947189B2May 24, 2011
Vacuum processing apparatus and vacuum processing method of sample
HITACHI HIGH TECH CORP0 citations41
MITSUBISHI CHEM CORP
3 patentsUS10830947B2Nov 10, 2020
Optical fiber, method for manufacturing optical fiber, optical fiber cable, and sensor
MITSUBISHI CHEM CORP0 citations51
US10962685B2Mar 30, 2021
Plastic optical fiber, plastic optical fiber cable, wire harness and vehicle
MITSUBISHI CHEM CORP0 citations49
US11346999B2May 31, 2022
Optical fiber cable, harness, and method of manufacturing optical fiber cable
MITSUBISHI CHEM CORP0 citations41