P

Inventor

KIHARA HIDEKI

JP31 patents
⚠️ This page may combine multiple inventors who share the name “KIHARA HIDEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

19 patents
US6646233B2Nov 11, 2003

Wafer stage for wafer processing apparatus and wafer processing method

HITACHI HIGH TECH CORP89 citations98
US7138606B2Nov 21, 2006

Wafer processing method

HITACHI HIGH TECH CORP53 citations96
US7828928B2Nov 9, 2010

Vacuum processing apparatus

HITACHI HIGH TECH CORP10 citations92
US7335277B2Feb 26, 2008

Vacuum processing apparatus

HITACHI HIGH TECH CORP24 citations92
US7247207B2Jul 24, 2007

Vacuum processing apparatus

HITACHI HIGH TECH CORP11 citations92
US6895179B2May 17, 2005

Wafer stage for wafer processing apparatus

HITACHI HIGH TECH CORP37 citations92
US6825617B2Nov 30, 2004

Semiconductor processing apparatus

HITACHI HIGH TECH CORP37 citations92
US7416633B2Aug 26, 2008

Plasma processing apparatus

HITACHI HIGH TECH CORP9 citations84
US7353076B2Apr 1, 2008

Vacuum processing method and vacuum processing apparatus

HITACHI HIGH TECH CORP14 citations80
US7833429B2Nov 16, 2010

Plasma processing method

HITACHI HIGH TECH CORP7 citations74
US7740739B2Jun 22, 2010

Plasma processing apparatus and method

HITACHI HIGH TECH CORP5 citations74
US7674351B2Mar 9, 2010

Plasma processing apparatus

HITACHI HIGH TECH CORP3 citations63
US7183715B2Feb 27, 2007

Method for operating a semiconductor processing apparatus

HITACHI HIGH TECH CORP2 citations63
US7833382B2Nov 16, 2010

Vacuum processing apparatus

HITACHI HIGH TECH CORP1 citations62
US7296783B2Nov 20, 2007

Vacuum processing apparatus

HITACHI HIGH TECH CORP2 citations60
USD546354SJul 10, 2007

Semiconductor manufacturing apparatus

HITACHI HIGH TECH CORP4 citations57
US7976632B2Jul 12, 2011

Vacuum processing apparatus

HITACHI HIGH TECH CORP0 citations52
US11482435B2Oct 25, 2022

Plasma processing apparatus

HITACHI HIGH TECH CORP0 citations47
US7947189B2May 24, 2011

Vacuum processing apparatus and vacuum processing method of sample

HITACHI HIGH TECH CORP0 citations41

MITSUBISHI CHEM CORP

3 patents

NISHIO RYOJI

2 patents

MITSUBISHI RAYON CO

2 patents

HITACHI LTD

1 patent

OHASHI TOMOHIRO

1 patent

KAO CORP

1 patent

HASHIMOTO TAKAHISA

1 patent

MAKINO AKITAKA

1 patent