Inventor

HANEISHI TOMOKI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “HANEISHI TOMOKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KATO HITOSHI

1 patent

US8673079B2Mar 18, 2014

Film deposition apparatus and substrate processing apparatus

KATO HITOSHI11 citations81

TOKYO ELECTRON LTD

1 patent

USD518884SApr 11, 2006

Heating tube for semiconductor-making furnace

TOKYO ELECTRON LTD4 citations54