USD518884SExpiredUtility

Heating tube for semiconductor-making furnace

32
Assignee: TOKYO ELECTRON LTDPriority: Nov 22, 2002Filed: May 22, 2003Granted: Apr 11, 2006
Est. expiryNov 22, 2022(expired)· nominal 20-yr term from priority
Inventors:Tomoki Haneishi
32
PatentIndex Score
4
Cited by
3
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       I claim the ornamental design for heating tube for semiconductor-making furnace, as shown and described.

Join the waitlist — get patent alerts

Track USD518884S — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.