Inventor
OUYE ALAN
US12 patents
⚠️ This page may combine multiple inventors who share the name “OUYE ALAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS6916398B2Jul 12, 2005
Gas delivery apparatus and method for atomic layer deposition
APPLIED MATERIALS INC646 citations99
US6905541B2Jun 14, 2005
Method and apparatus of generating PDMAT precursor
APPLIED MATERIALS INC119 citations99
US7780785B2Aug 24, 2010
Gas delivery apparatus for atomic layer deposition
APPLIED MATERIALS INC61 citations98
US7270709B2Sep 18, 2007
Method and apparatus of generating PDMAT precursor
APPLIED MATERIALS INC50 citations96
US7780788B2Aug 24, 2010
Gas delivery apparatus for atomic layer deposition
APPLIED MATERIALS INC17 citations92
US7699023B2Apr 20, 2010
Gas delivery apparatus for atomic layer deposition
APPLIED MATERIALS INC34 citations92
US7597758B2Oct 6, 2009
Chemical precursor ampoule for vapor deposition processes
APPLIED MATERIALS INC16 citations92
US7524374B2Apr 28, 2009
Method and apparatus for generating a precursor for a semiconductor processing system
APPLIED MATERIALS INC26 citations92
US6228208B1May 8, 2001
Plasma density and etch rate enhancing semiconductor processing chamber
APPLIED MATERIALS INC33 citations92
US7588736B2Sep 15, 2009
Apparatus and method for generating a chemical precursor
APPLIED MATERIALS INC7 citations74