Inventor

NAGENGAST ANDREW J

US44 patents

⚠️ This page may combine multiple inventors who share the name “NAGENGAST ANDREW J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAGENGAST ANDREW J

APPLIED MATERIALS INC

Carrier head with retaining ring and carrier ring

Flexible membrane for carrier head

Flexible membrane for carrier head

Carrier ring for carrier head

Carrier head with retaining ring and carrier ring

Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly

Retaining ring having inner surfaces with facets

Retaining ring having inner surfaces with facets

Multi-chamber carrier head with a textured membrane

Carrier ring for carrier head

Retaining ring having inner surfaces with features

Carrier head vibration damping

Retaining ring having inner surfaces with facets

Retaining ring having inner surfaces with facets

Textured membrane for a multi-chamber carrier head

Retaining ring having inner surfaces with features

Retaining ring having inner surfaces with features

Retaining ring for CMP

Retaining ring and articles for carrier head

Retaining ring and articles for carrier head

Retaining ring having inner surfaces with features

Dual membrane carrier head for chemical mechanical polishing

Dual membrane carrier head for chemical mechanical polishing

Pivotable substrate retaining ring

Retaining ring for CMP

Pivotable substrate retaining ring

Textured membrane for a multi-chamber carrier head

Polishing carrier head with piezoelectric pressure control

Polishing carrier head with piezoelectric pressure control

Polishing carrier head with floating edge control

Deformable substrate chuck

Retainer for chemical mechanical polishing carrier head

Machine learning for classifying retaining rings

Polishing carrier head with multiple angular pressurizable zones

ZUNIGA STEVEN M

Flexible membrane for carrier head

Bonding apparatus and method

Two-chamber system and method for serial bonding and exfoliation of multiple workpieces

Bonding apparatus and method

Apparatus and method for simultaneous treatment of multiple workpieces

LAM RES CORP

Use of zeta potential during chemical mechanical polishing for end point detection

Apparatus and method for performing end point detection on a linear planarization tool

OH JEONGHOON

Multi-chamber carrier head with a textured membrane

GTAT CORP

Apparatus and method for simultaneous treatment of multiple workpieces

RODNICK MATTHEW J

End effector having multiple-position contact points