Inventor

KIRSCHSTEIN ULF-CARSTEN

DE6 patents

⚠️ This page may combine multiple inventors who share the name “KIRSCHSTEIN ULF-CARSTEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHUBERT GERHARD

3 patents

US8529130B2Sep 10, 2013

Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application

SCHUBERT GERHARD2 citations58

US8267582B2Sep 18, 2012

Table guided by aerostatic bearing elements for vacuum application

SCHUBERT GERHARD3 citations58

US8496221B2Jul 30, 2013

Aerostatically guided table system for vacuum application

SCHUBERT GERHARD1 citations48

LEICA MICROSYS LITHOGRAPHY LTD

2 patents

US6639225B2Oct 28, 2003

Six-axis positioning system having a zero-magnetic-field space

LEICA MICROSYS LITHOGRAPHY LTD27 citations84

US6426860B1Jul 30, 2002

Holding device for a substrate

LEICA MICROSYS LITHOGRAPHY LTD7 citations71

LEICA MICROSTSTEMS LITHOGRAPHY

1 patent

US6480369B1Nov 12, 2002

System for receiving and retaining a substrate

LEICA MICROSTSTEMS LITHOGRAPHY6 citations56