Inventor
PETASCH THOMAS
DE19 patents
⚠️ This page may combine multiple inventors who share the name “PETASCH THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
9 patentsUS7193794B2Mar 20, 2007
Adjustment arrangement of an optical element
ZEISS CARL SMT AG29 citations92
US7061698B2Jun 13, 2006
Lens system, in particular a projection lens system for semiconductor lithography
ZEISS CARL SMT AG29 citations91
US6870632B2Mar 22, 2005
Apparatus for mounting an optical element in an optical system
ZEISS CARL SMT AG48 citations91
US7471469B2Dec 30, 2008
Device for the low-deformation replaceable mounting of an optical element
ZEISS CARL SMT AG5 citations73
US7295331B2Nov 13, 2007
Optical element with an optical axis
ZEISS CARL SMT AG9 citations72
US7656595B2Feb 2, 2010
Adjustment arrangement of an optical element
ZEISS CARL SMT AG1 citations62
US7457059B2Nov 25, 2008
Adjustment arrangement of an optical element
ZEISS CARL SMT AG2 citations62
US7082693B2Aug 1, 2006
Adjusting apparatus for devices and for setting adjustments
ZEISS CARL SMT AG2 citations61
US7800849B2Sep 21, 2010
Apparatus for mounting two or more elements and method for processing the surface of an optical element
ZEISS CARL SMT AG2 citations57
ZEISS CARL SMT GMBH
7 patentsUS10520826B2Dec 31, 2019
Optical element, optical assembly and production method
ZEISS CARL SMT GMBH3 citations68
US10175582B2Jan 8, 2019
Optical element, optical assembly and production method
ZEISS CARL SMT GMBH3 citations68
US9557653B2Jan 31, 2017
Optical projection system
ZEISS CARL SMT GMBH1 citations62
US9104016B2Aug 11, 2015
Optical projection system
ZEISS CARL SMT GMBH2 citations62
US9494868B2Nov 15, 2016
Lithographic projection objective
ZEISS CARL SMT GMBH2 citations60
US9891535B2Feb 13, 2018
Optical projection system
ZEISS CARL SMT GMBH0 citations51
US10042265B2Aug 7, 2018
Lithographic projection objective
ZEISS CARL SMT GMBH0 citations49