Optical element, optical assembly and production method

Abstract

An optical element for transmitting radiation includes: a first surface region surrounding an optically used area of the optical element; and a second surface region that adjoins the first surface region. A circumferential edge is formed between the first and second surface regions. The optical element further includes a one-piece film which covers the first surface region, the edge and the second surface region. The film includes a hydrophobic material at least on its side facing away from the first and the second surface regions. An optical assembly includes at least one such optical element. A method produces such an optical element.

What is claimed is: 
     
       1. An article configured to transmit radiation, the article comprising:
 an optical element comprising an optically used region, a first surface region surrounding the optically used region, and a second surface region adjoining the first surface region so that a peripheral edge is present between the first and second surface regions; 
 a first adhesive layer; and 
 a one-piece film covering the first surface region, the peripheral edge and the second surface region, 
 wherein:
 the first adhesive layer is between the optical element and the one-piece film; 
 the first adhesive layer connects the one-piece film to the first and second surface regions of the optical element; 
 the one-piece film comprises a hydrophobic material at least on a side of the one-piece film facing away from the first and second surface regions; and 
 the one-piece film is preformed. 
 
 
     
     
       2. The article of  claim 1 , wherein the one-piece film has a bend in a region of the peripheral edge. 
     
     
       3. The article of  claim 1 , wherein:
 the first adhesive layer comprises first and second portions; 
 the first portion of the first adhesive layer connects the one-piece film to the first surface region; and 
 the second portion of the first adhesive layer connects the one-piece film to the second surface region. 
 
     
     
       4. The article of  claim 1 , wherein the first adhesive layer comprises an adhesive tape. 
     
     
       5. The article of  claim 1 , further comprising a heat-conducting component between the one-piece film and at least one region selected from the group consisting of the first surface region and the second surface region. 
     
     
       6. The article of  claim 5 , wherein the heat-conducting component comprises a heat-conducting layer. 
     
     
       7. The article of  claim 5 , wherein the heat-conducting component extends into the first and second surface regions. 
     
     
       8. The article of  claim 5 , further comprising a second adhesive layer, wherein the heat-conducting component is between the first and second adhesive layers. 
     
     
       9. The article of  claim 5 , wherein the heat-conducting component does not extend to an edge of the one-piece film in at least one region selected from the group consisting of the first surface region and the second surface region. 
     
     
       10. The article of  claim 5 , wherein the heat-conducting component comprises a material having a thermal conductivity greater than 100 W m −1  K −1 . 
     
     
       11. The article of  claim 1 , wherein the one-piece film has a thermal conductivity of more than 100 W m −1  K −1 . 
     
     
       12. The article of  claim 1 , wherein the hydrophobic material of the one-piece film comprises at least one material selected from the group consisting of polyolefins, polyacrylates, (poly)vinylchlorides, polystyrenes, polysiloxanes, polycarbonates and epoxy polymers. 
     
     
       13. The article of  claim 1 , wherein the hydrophobic material is roughened on the side of the one-piece film that faces away from the first and second surface regions. 
     
     
       14. The article of  claim 1 , wherein the hydrophobic material comprises a coating on the side of the one-piece film facing away from the first and second surface regions. 
     
     
       15. The article of  claim 1 , wherein the one-piece film has a thickness of less than 500 μm. 
     
     
       16. The article of  claim 1 , further comprising a radiation-protection layer on at least one region selected from the group consisting of the first surface region and the second surface region. 
     
     
       17. The article of  claim 1 , wherein the first surface region defines a peripheral lateral surface of a conical volume region of the optical element. 
     
     
       18. The article of  claim 17 , wherein the second surface region is planar and surrounds the first surface region in an annular manner. 
     
     
       19. The article of  claim 1 , wherein the second surface region is planar and surrounds the first surface region in an annular manner. 
     
     
       20. An apparatus, comprising:
 an article according to  claim 1 , wherein 
 the apparatus is an immersion lithography projection exposure apparatus. 
 
     
     
       21. The optical assembly of  claim 20 , further comprising an immersion fluid, wherein an end face of the article is at least partially immersed in the immersion fluid. 
     
     
       22. The article of  claim 1 , wherein the first adhesive layer is adhered directly to the optical element, and the one-piece film is adhered directly to the first adhesive layer. 
     
     
       23. The article of  claim 1 , wherein:
 the first adhesive layer comprises a double-sided tape which comprises first and second sides; 
 the first side of the adhesive tape is adhered directly to the optical element; and 
 the second side of the adhesive tape is adhered directly to the one-piece film.