Inventor · disambiguated record
Thomas Petasch
Also filed as: PETASCH THOMAS
19 granted patents·5 pending applications·147 citations·filing 2002–2022
94Inventor score
Top patents by PatentIndex Score
24 records- 0188US7193794B2Adjustment arrangement of an optical elementZEISS CARL SMT AG·Filed 2004·Granted Mar 20, 2007·29 cites·110 claims
- 0288US6870632B2Apparatus for mounting an optical element in an optical systemZEISS CARL SMT AG·Filed 2002·Granted Mar 22, 2005·48 cites·26 claims
- 0383US7061698B2Lens system, in particular a projection lens system for semiconductor lithographyZEISS CARL SMT AG·Filed 2002·Granted Jun 13, 2006·29 cites·46 claims
- 0482US9104016B2Optical projection systemZEISS CARL SMT GMBH·Filed 2012·Granted Aug 11, 2015·2 cites·24 claims
- 0579US10520826B2Optical element, optical assembly and production methodZEISS CARL SMT GMBH·Filed 2018·Granted Dec 31, 2019·3 cites·21 claims
- 0679US9494868B2Lithographic projection objectiveZEISS CARL SMT GMBH·Filed 2013·Granted Nov 15, 2016·2 cites·34 claims
- 0778US10175582B2Optical element, optical assembly and production methodZEISS CARL SMT GMBH·Filed 2017·Granted Jan 8, 2019·3 cites·23 claims
- 0876US8300210B2Optical projection systemRAU JOHANNES·Filed 2005·Granted Oct 30, 2012·3 cites·33 claims
- 0974US8605253B2Lithographic projection objectiveROGALSKY OLAF·Filed 2008·Granted Dec 10, 2013·4 cites·46 claims
- 1074US7471469B2Device for the low-deformation replaceable mounting of an optical elementZEISS CARL SMT AG·Filed 2005·Granted Dec 30, 2008·5 cites·45 claims
- 1170US9557653B2Optical projection systemZEISS CARL SMT GMBH·Filed 2015·Granted Jan 31, 2017·1 cites·30 claims
- 1264US7656595B2Adjustment arrangement of an optical elementZEISS CARL SMT AG·Filed 2008·Granted Feb 2, 2010·1 cites·27 claims
- 1363US7295331B2Optical element with an optical axisZEISS CARL SMT AG·Filed 2002·Granted Nov 13, 2007·9 cites·27 claims
- 1463US2018259856A1Optical Projection SystemZEISS CARL SMT GMBH·Filed 2018·Application pending·0 cites
- 1562US9891535B2Optical projection systemZEISS CARL SMT GMBH·Filed 2017·Granted Feb 13, 2018·0 cites·20 claims
- 1662US8582081B2Device for the low-deformation replaceable mounting of an optical elementSORG FRANZ·Filed 2008·Granted Nov 12, 2013·2 cites·12 claims
- 1762US7457059B2Adjustment arrangement of an optical elementZEISS CARL SMT AG·Filed 2006·Granted Nov 25, 2008·2 cites·49 claims
- 1861US2019025709A1Lithographic projection objectiveZEISS CARL SMT GMBH·Filed 2018·Application pending·0 cites
- 1958US10042265B2Lithographic projection objectiveZEISS CARL SMT GMBH·Filed 2016·Granted Aug 7, 2018·0 cites·11 claims
- 2055US7800849B2Apparatus for mounting two or more elements and method for processing the surface of an optical elementZEISS CARL SMT AG·Filed 2005·Granted Sep 21, 2010·2 cites·4 claims
- 2155US2014063628A1Device for the low-deformation replaceable mounting of an optical elementZEISS CARL SMT GMBH·Filed 2013·Application pending·0 cites
- 2253US2022308466A1Device for cleaning a surface in the interior of an optical systemZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
- 2346US7082693B2Adjusting apparatus for devices and for setting adjustmentsZEISS CARL SMT AG·Filed 2002·Granted Aug 1, 2006·2 cites·47 claims
- 2429US2002186479A1Optical systemFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →