Inventor · disambiguated record

Patrick Tung-Sing Pak

Also filed as: TUNG-SING PAK PATRICK

1 granted patent·40 citations·filing 2008–2008

47Inventor score

Technology areasG06T

Files withKLA TENCOR CORP1

Top patents by PatentIndex Score

1 record

0185US8041106B2Methods and systems for detecting defects on a reticleKLA TENCOR CORP·Filed 2008·Granted Oct 18, 2011·40 cites·20 claims

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