Inventor
CHANG YANG-HUNG
TW11 patents
⚠️ This page may combine multiple inventors who share the name “CHANG YANG-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS10031426B2Jul 24, 2018
Method and system for overlay control
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US10281827B2May 7, 2019
Noise reduction for overlay control
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US10866524B2Dec 15, 2020
Method and system for overlay control
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10514612B2Dec 24, 2019
Method and system for overlay control
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10684556B2Jun 16, 2020
Noise reduction for overlay control
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US10031997B1Jul 24, 2018
Forecasting wafer defects using frequency domain analysis
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11513444B2Nov 29, 2022
Noise reduction for overlay control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10867116B2Dec 15, 2020
Forecasting wafer defects using frequency domain analysis
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10521548B2Dec 31, 2019
Forecasting wafer defects using frequency domain analysis
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50