Inventor
HU CHUN-MING
TW14 patents
⚠️ This page may combine multiple inventors who share the name “HU CHUN-MING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS10281827B2May 7, 2019
Noise reduction for overlay control
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US10684556B2Jun 16, 2020
Noise reduction for overlay control
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US10031997B1Jul 24, 2018
Forecasting wafer defects using frequency domain analysis
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11513444B2Nov 29, 2022
Noise reduction for overlay control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US9455156B2Sep 27, 2016
Method of making a semiconductor device using multiple layer sets
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10867116B2Dec 15, 2020
Forecasting wafer defects using frequency domain analysis
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10521548B2Dec 31, 2019
Forecasting wafer defects using frequency domain analysis
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US11287746B1Mar 29, 2022
System and method for overlay error reduction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
TAIWAN SEMICONDUCTOR MFG
3 patentsUS7301603B2Nov 27, 2007
Exposure system and method
TAIWAN SEMICONDUCTOR MFG35 citations90
US9070622B2Jun 30, 2015
Systems and methods for similarity-based semiconductor process control
TAIWAN SEMICONDUCTOR MFG4 citations70
US9159580B2Oct 13, 2015
Method of making a semiconductor device using multiple layer sets
TAIWAN SEMICONDUCTOR MFG3 citations61