Inventor
OZTURK OZKAN
US8 patents
Patents
8 patentsUS11776840B2Oct 3, 2023
Superstrate chuck, method of use, and method of manufacturing an article
CANON KK2 citations71
US11562924B2Jan 24, 2023
Planarization apparatus, planarization process, and method of manufacturing an article
CANON KK2 citations70
US12138747B2Nov 12, 2024
Planarization process, apparatus and method of manufacturing an article
CANON KK0 citations61
US11043407B2Jun 22, 2021
Planarization process, apparatus and method of manufacturing an article
CANON KK1 citations61
US11034057B2Jun 15, 2021
Planarization process, apparatus and method of manufacturing an article
CANON KK0 citations61
US12283522B2Apr 22, 2025
Planarization apparatus, planarization process, and method of manufacturing an article
CANON KK0 citations60
US12300522B2May 13, 2025
Apparatus including a substrate chuck, a dispenser, and a planarization head and methods of using the same
CANON KK0 citations59
US11018018B2May 25, 2021
Superstrate and methods of using the same
CANON KK0 citations58