Planarization apparatus, planarization process, and method of manufacturing an article

Abstract

A superstrate for planarizing a substrate. The superstrate includes a body having a first side having a contact surface and a second side having a central portion and a peripheral portion surrounding the central portion. The peripheral portion includes a recessed region.

What is claimed is: 
     
       1. An apparatus, comprising:
 a chuck comprising a plurality of lands defining a central zone and a peripheral zone surrounding the central zone; and 
 a superstrate including:
 a body having an edge; 
 a first side having:
 a mesa extending therefrom, wherein an edge of the mesa is at a radial width from the edge of the body; 
 a contact surface provided on the mesa to be in contact with a formable material formed on a substrate; and 
 
 a second side opposite to the first side having a central portion and a peripheral portion surrounding the central portion, the peripheral portion including a recessed region, 
 
 wherein the second side is in contact with the lands of the chuck while being retained thereby. 
 
     
     
       2. The apparatus of  claim 1 , wherein recessed region is concentric with the body. 
     
     
       3. The apparatus of  claim 1 , wherein the recessed region includes a stepped down surface extending circumferentially throughout the peripheral portion of the second side. 
     
     
       4. The apparatus of  claim 1 , wherein the recessed region includes a tapered down surface extending circumferentially throughout the peripheral portion of the second side. 
     
     
       5. The apparatus of  claim 1 , wherein the recessed region of the second side has a radial width wider than the radial width from the edge of the mesa to the edge of the body. 
     
     
       6. The apparatus of  claim 1 , wherein the recessed region of the second side has a radial width equal to the radial width from the edge of the mesa to the edge of the body. 
     
     
       7. The apparatus of  claim 1 , wherein the recessed region further comprises a trench extending circumferentially between the central portion and an edge of the second side. 
     
     
       8. The apparatus of  claim 1 , wherein the lands of the chuck have a same height.