Inventor · disambiguated record
Seth J. Bamesberger
Also filed as: BAMESBERGER SETH J
23 granted patents·11 pending applications·28 citations·filing 2014–2025
92Inventor score
Top patents by PatentIndex Score
34 records- 0193US9971249B1Method and system for controlled ultraviolet light exposureCANON KK·Filed 2017·Granted May 15, 2018·10 cites·20 claims
- 0290US11728203B2Chuck assembly, planarization process, apparatus and method of manufacturing an articleCANON KK·Filed 2020·Granted Aug 15, 2023·2 cites·20 claims
- 0388US11562924B2Planarization apparatus, planarization process, and method of manufacturing an articleCANON KK·Filed 2020·Granted Jan 24, 2023·2 cites·8 claims
- 0483US11145535B2Planarization process, apparatus and method of manufacturing an articleCANON KK·Filed 2019·Granted Oct 12, 2021·3 cites·17 claims
- 0583US10754078B2Light source, a shaping system using the light source and an article manufacturing methodCANON KK·Filed 2018·Granted Aug 25, 2020·4 cites·20 claims
- 0682US11590687B2Systems and methods for reducing pressure while shaping a filmCANON KK·Filed 2020·Granted Feb 28, 2023·1 cites·13 claims
- 0781US12165903B2Chuck assembly, planarization process, apparatus and method of manufacturing an articleCANON KK·Filed 2023·Granted Dec 10, 2024·0 cites·20 claims
- 0879US2025069938A1Chuck assembly, planarization process, apparatus and method of manufacturing an articleCANON KK·Filed 2024·Application pending·0 cites
- 0978US11776840B2Superstrate chuck, method of use, and method of manufacturing an articleCANON KK·Filed 2019·Granted Oct 3, 2023·2 cites·13 claims
- 1076US2025306455A1Planarization process, apparatus and method of manufacturing an articleCANON KK·Filed 2025·Application pending·0 cites
- 1175US9778578B2Low contact imprint lithography template chuck system for improved overlay correctionCANON NANOTECHNOLOGIES INC·Filed 2014·Granted Oct 3, 2017·2 cites·16 claims
- 1274US2024419090A1Reaction chamber with stop-gapped vacuum sealCANON KK·Filed 2024·Application pending·0 cites
- 1373US12138747B2Planarization process, apparatus and method of manufacturing an articleCANON KK·Filed 2022·Granted Nov 12, 2024·0 cites·7 claims
- 1473US10895806B2Imprinting method and apparatusCANON KK·Filed 2018·Granted Jan 19, 2021·1 cites·18 claims
- 1573US2024321586A1Planarization process, planarization system, and method of manufacturing an articleCANON KK·Filed 2024·Application pending·0 cites
- 1672US2024145269A1Planarization process, planarization system and method of manufacturing an articleCANON KK·Filed 2024·Application pending·0 cites
- 1771US12283522B2Planarization apparatus, planarization process, and method of manufacturing an articleCANON KK·Filed 2022·Granted Apr 22, 2025·0 cites·9 claims
- 1871US11043407B2Planarization process, apparatus and method of manufacturing an articleCANON KK·Filed 2019·Granted Jun 22, 2021·1 cites·17 claims
- 1970US2025216775A1Method of shaping a surface, shaping system, and method of manufacturing an articleCANON KK·Filed 2025·Application pending·0 cites
- 2067US12242205B2Reaction chamber with stop-gapped vacuum sealCANON KK·Filed 2021·Granted Mar 4, 2025·0 cites·11 claims
- 2167US12027373B2Planarization process, planarization system, and method of manufacturing an articleCANON KK·Filed 2021·Granted Jul 2, 2024·0 cites·18 claims
- 2267US2024231220A9Planarization process, apparatus and method of manufacturing an articleCANON KK·Filed 2022·Application pending·0 cites
- 2366US2025319637A1System including an array including a heat source and an actinic radiation sourceCANON KK·Filed 2024·Application pending·0 cites
- 2464US12282251B2Method of shaping a surface, shaping system, and method of manufacturing an articleCANON KK·Filed 2021·Granted Apr 22, 2025·0 cites·19 claims
- 2560US11908711B2Planarization process, planarization system and method of manufacturing an articleCANON KK·Filed 2020·Granted Feb 20, 2024·0 cites·7 claims
- 2660US2025269438A1Chuck assembly, planarization process, apparatus and method of manufacturing an articleCANON KK·Filed 2024·Application pending·0 cites
- 2759US2025205966A1System including an insertable heating member or an insertable thermal shield and a method of using the sameCANON KK·Filed 2023·Application pending·0 cites
- 2856US2024429060A1Planarization system, planarizing method, and method of manufacturing an articleCANON KK·Filed 2023·Application pending·0 cites
- 2955US11034057B2Planarization process, apparatus and method of manufacturing an articleCANON KK·Filed 2019·Granted Jun 15, 2021·0 cites·22 claims
- 3052US11040366B2Dispenser shield with adjustable aperture to improve drop placement and residual layer thicknessCANON KK·Filed 2018·Granted Jun 22, 2021·0 cites·17 claims
- 3151US11725272B2Method, system and apparatus for cooling a substrateCANON KK·Filed 2021·Granted Aug 15, 2023·0 cites·15 claims
- 3243US10416576B2Optical system for use in stage controlCANON KK·Filed 2016·Granted Sep 17, 2019·0 cites·6 claims
- 3341US11198235B2Flexible mask modulation for controlling atmosphere between mask and substrate and methods of using the sameCANON KK·Filed 2018·Granted Dec 14, 2021·0 cites·9 claims
- 3441US10996561B2Nanoimprint lithography with a six degrees-of-freedom imprint head moduleCANON KK·Filed 2017·Granted May 4, 2021·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →