Inventor
BAMESBERGER SETH J
US24 patents
⚠️ This page may combine multiple inventors who share the name “BAMESBERGER SETH J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
23 patentsUS9971249B1May 15, 2018
Method and system for controlled ultraviolet light exposure
CANON KK10 citations81
US11728203B2Aug 15, 2023
Chuck assembly, planarization process, apparatus and method of manufacturing an article
CANON KK2 citations72
US11145535B2Oct 12, 2021
Planarization process, apparatus and method of manufacturing an article
CANON KK3 citations72
US10754078B2Aug 25, 2020
Light source, a shaping system using the light source and an article manufacturing method
CANON KK4 citations72
US11776840B2Oct 3, 2023
Superstrate chuck, method of use, and method of manufacturing an article
CANON KK2 citations71
US11562924B2Jan 24, 2023
Planarization apparatus, planarization process, and method of manufacturing an article
CANON KK2 citations70
US12550688B2Feb 10, 2026
Planarization process, apparatus and method of manufacturing an article
CANON KK0 citations62
US12027373B2Jul 2, 2024
Planarization process, planarization system, and method of manufacturing an article
CANON KK0 citations62
US11590687B2Feb 28, 2023
Systems and methods for reducing pressure while shaping a film
CANON KK1 citations62
US12165903B2Dec 10, 2024
Chuck assembly, planarization process, apparatus and method of manufacturing an article
CANON KK0 citations61
US12138747B2Nov 12, 2024
Planarization process, apparatus and method of manufacturing an article
CANON KK0 citations61
US11043407B2Jun 22, 2021
Planarization process, apparatus and method of manufacturing an article
CANON KK1 citations61
US11034057B2Jun 15, 2021
Planarization process, apparatus and method of manufacturing an article
CANON KK0 citations61
US12283522B2Apr 22, 2025
Planarization apparatus, planarization process, and method of manufacturing an article
CANON KK0 citations60
US10895806B2Jan 19, 2021
Imprinting method and apparatus
CANON KK1 citations60
US12282251B2Apr 22, 2025
Method of shaping a surface, shaping system, and method of manufacturing an article
CANON KK0 citations51
US11908711B2Feb 20, 2024
Planarization process, planarization system and method of manufacturing an article
CANON KK0 citations51
US11198235B2Dec 14, 2021
Flexible mask modulation for controlling atmosphere between mask and substrate and methods of using the same
CANON KK0 citations51
US11040366B2Jun 22, 2021
Dispenser shield with adjustable aperture to improve drop placement and residual layer thickness
CANON KK0 citations51
US12242205B2Mar 4, 2025
Reaction chamber with stop-gapped vacuum seal
CANON KK0 citations50
US11725272B2Aug 15, 2023
Method, system and apparatus for cooling a substrate
CANON KK0 citations50
US10996561B2May 4, 2021
Nanoimprint lithography with a six degrees-of-freedom imprint head module
CANON KK0 citations47
US10416576B2Sep 17, 2019
Optical system for use in stage control
CANON KK0 citations39