Inventor
HSU KIRK
TW5 patents
Patents
5 patentsUS6383921B1May 7, 2002
Self aligned silicide contact method of fabrication
UNITED MICROELECTRONICS CORP14 citations75
US6221767B1Apr 24, 2001
Method of fabricating a silicide landing pad
UNITED MICROELECTRONICS CORP11 citations72
US6689673B1Feb 10, 2004
Method for forming a gate with metal silicide
UNITED MICROELECTRONICS CORP12 citations70
US6627525B2Sep 30, 2003
Method for preventing polycide gate spiking
UNITED MICROELECTRONICS CORP2 citations61
US6238958B1May 29, 2001
Method for forming a transistor with reduced source/drain series resistance
UNITED MICROELECTRONICS CORP5 citations61