Inventor
HAN SUK-BIN
KR17 patents
Patents
17 patentsUS5839456ANov 24, 1998
Wafer wet treating apparatus
LG SEMICON CO LTD198 citations98
US6532976B1Mar 18, 2003
Semiconductor wafer cleaning apparatus
LG SEMICON CO LTD39 citations92
US6103603AAug 15, 2000
Method of fabricating gate electrodes of twin-well CMOS device
LG SEMICON CO LTD30 citations92
US5948173ASep 7, 1999
System and method for cleaning a semiconductor wafer
LG SEMICON CO LTD21 citations92
US5885360AMar 23, 1999
Semiconductor wafer cleaning apparatus
LG SEMICON CO LTD18 citations92
US5850841ADec 22, 1998
Cleaning apparatus of semiconductor device
LG SEMICON CO LTD34 citations92
US5743280AApr 28, 1998
Apparatus for cleansing semiconductor wafer
LG SEMICON CO LTD17 citations83
US5637425AJun 10, 1997
Method for fabricating phase shift mask comprising a polymethylmethacrylate phase shift film
LG SEMICON CO LTD10 citations74
US6107173AAug 22, 2000
Method of manufacturing semiconductor device
LG SEMICON CO LTD8 citations73
US5976311ANov 2, 1999
Semiconductor wafer wet processing device
LG SEMICON CO LTD11 citations73
US5913429AJun 22, 1999
Wafer supporting and/or conveying apparatus
LG SEMICON CO LTD7 citations73
US5873381AFeb 23, 1999
Wet treatment apparatus for semiconductor wafer
LG SEMICON CO LTD9 citations73
US5845663ADec 8, 1998
Wafer wet processing device
LG SEMICON CO LTD16 citations73
US5842491ADec 1, 1998
Semiconductor wafer cleaning apparatus
LG SEMICON CO LTD15 citations73
US6637443B2Oct 28, 2003
Semiconductor wafer cleaning apparatus and method
LG SEMICON CO LTD4 citations62
US5673713AOct 7, 1997
Apparatus for cleansing semiconductor wafer
LG SEMICON CO LTD3 citations62
US5799678ASep 1, 1998
Apparatus for cleansing semiconductor wafer
LG SEMICON CO LTD1 citations51