Inventor
SASAKI SUGURU
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SASAKI SUGURU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OKI ELECTRIC IND CO LTD
5 patentsUS6989333B2Jan 24, 2006
Process for forming a pattern
OKI ELECTRIC IND CO LTD14 citations83
US7459243B2Dec 2, 2008
Method of correcting mask pattern
OKI ELECTRIC IND CO LTD8 citations72
US6999160B2Feb 14, 2006
Optimization method of aperture type of projection aligner
OKI ELECTRIC IND CO LTD3 citations61
US7180199B2Feb 20, 2007
Semiconductor device and semiconductor wafer
OKI ELECTRIC IND CO LTD1 citations51
US7312019B2Dec 25, 2007
Linear grating formation method
OKI ELECTRIC IND CO LTD0 citations41