Inventor
LAURENT THIBAULT SIMON MATHIEU
NL43 patents
⚠️ This page may combine multiple inventors who share the name “LAURENT THIBAULT SIMON MATHIEU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
34 patentsUS10324382B2Jun 18, 2019
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations83
US9971252B2May 15, 2018
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations83
US9823589B2Nov 21, 2017
Lithographic apparatus and method
ASML NETHERLANDS BV5 citations83
US9785055B2Oct 10, 2017
Object holder and lithographic apparatus
ASML NETHERLANDS BV7 citations83
US9575419B2Feb 21, 2017
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations83
US11281115B2Mar 22, 2022
Lithographic apparatus and method
ASML NETHERLANDS BV1 citations72
US10747126B2Aug 18, 2020
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations72
US9915877B2Mar 13, 2018
Object holder and lithographic apparatus
ASML NETHERLANDS BV3 citations72
US9740110B2Aug 22, 2017
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations72
US10520837B2Dec 31, 2019
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US11650511B2May 16, 2023
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
USRE48668EAug 3, 2021
Temperature sensing probe, burl plate, lithographic apparatus and method
ASML NETHERLANDS BV0 citations62
US12204255B2Jan 21, 2025
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations61
US11630399B2Apr 18, 2023
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations61
US11300890B2Apr 12, 2022
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US9513568B2Dec 6, 2016
Lithographic apparatus
ASML NETHERLANDS BV2 citations61
US11846879B2Dec 19, 2023
Method of unloading an object from a support table
ASML NETHERLANDS BV0 citations59
US11500296B2Nov 15, 2022
Method of unloading an object from a support table
ASML NETHERLANDS BV0 citations59
USRE49297ENov 15, 2022
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations59
USRE49142EJul 19, 2022
Lithographic apparatus and an object positioning system
ASML NETHERLANDS BV0 citations59
US11385547B2Jul 12, 2022
Extraction body for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11175594B2Nov 16, 2021
Method of unloading an object from a support table
ASML NETHERLANDS BV0 citations59
US10508896B2Dec 17, 2019
Measurement substrate and a measurement method
ASML NETHERLANDS BV1 citations59
US10495985B2Dec 3, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations58
US10788763B2Sep 29, 2020
Lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10481502B2Nov 19, 2019
Object holder and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10203611B2Feb 12, 2019
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations51
US10591828B2Mar 17, 2020
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations49
US10191377B2Jan 29, 2019
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations49
US10705426B2Jul 7, 2020
Extraction body for lithographic apparatus
ASML NETHERLANDS BV0 citations48
US10114295B2Oct 30, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US9971254B2May 15, 2018
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US9939738B2Apr 10, 2018
Lithographic apparatus and an object positioning system
ASML NETHERLANDS BV0 citations48
US9753382B2Sep 5, 2017
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48
KUNNEN JOHAN GERTRUDIS CORNELIS
3 patentsUS8970822B2Mar 3, 2015
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
KUNNEN JOHAN GERTRUDIS CORNELIS8 citations82
US9280063B2Mar 8, 2016
Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method
KUNNEN JOHAN GERTRUDIS CORNELIS3 citations71
US9897928B2Feb 20, 2018
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
KUNNEN JOHAN GERTRUDIS CORNELIS1 citations49