Inventor
DERKS SANDER CATHARINA REINIER
NL20 patents
⚠️ This page may combine multiple inventors who share the name “DERKS SANDER CATHARINA REINIER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
16 patentsUS10324382B2Jun 18, 2019
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations83
US9971252B2May 15, 2018
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations83
US9575419B2Feb 21, 2017
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations83
US10416574B2Sep 17, 2019
Lithographic apparatus
ASML NETHERLANDS BV5 citations82
US10747126B2Aug 18, 2020
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations72
US9740110B2Aug 22, 2017
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations72
US10520837B2Dec 31, 2019
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US10747127B2Aug 18, 2020
Lithographic apparatus
ASML NETHERLANDS BV5 citations68
US11650511B2May 16, 2023
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
USRE48668EAug 3, 2021
Temperature sensing probe, burl plate, lithographic apparatus and method
ASML NETHERLANDS BV0 citations62
US11300890B2Apr 12, 2022
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations61
US10935895B2Mar 2, 2021
Lithographic apparatus
ASML NETHERLANDS BV0 citations61
US11982947B2May 14, 2024
Contamination trap
ASML NETHERLANDS BV0 citations56
US11556067B2Jan 17, 2023
Contamination trap
ASML NETHERLANDS BV1 citations56
US9778574B2Oct 3, 2017
Apparatus, a device and a device manufacturing method
ASML NETHERLANDS BV0 citations43
US10775707B2Sep 15, 2020
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations31
KUNNEN JOHAN GERTRUDIS CORNELIS
3 patentsUS8970822B2Mar 3, 2015
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
KUNNEN JOHAN GERTRUDIS CORNELIS8 citations82
US9280063B2Mar 8, 2016
Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method
KUNNEN JOHAN GERTRUDIS CORNELIS3 citations71
US9897928B2Feb 20, 2018
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
KUNNEN JOHAN GERTRUDIS CORNELIS1 citations49