Inventor · disambiguated record
Chi-How Wu
Also filed as: WU CHI-HOW
3 granted patents·46 citations·filing 2000–2003
67Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG3
Top patents by PatentIndex Score
3 records- 0184US6283131B1In-situ strip process for polysilicon etching in deep sub-micron technologyTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Sep 4, 2001·39 cites·19 claims
- 0252US7018929B2Method for reducing a low volatility byproduct from a wafer surface following an etching processTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 28, 2006·7 cites·20 claims
- 0338USRE40007EIn-situ strip process for polysilicon etching in deep sub-micron technologyTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Jan 22, 2008·0 cites·55 claims
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