Inventor

SHROFF YASHESH

US2 patents

⚠️ This page may combine multiple inventors who share the name “SHROFF YASHESH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV CALIFORNIA

1 patent

US7075699B2Jul 11, 2006

Double hidden flexure microactuator for phase mirror array

UNIV CALIFORNIA21 citations89

INTEL CORP

1 patent

US7666555B2Feb 23, 2010

Pellicle, methods of fabrication and methods of use for extreme ultraviolet lithography

INTEL CORP14 citations77