Double hidden flexure microactuator for phase mirror array

Abstract

Disclosed is an actuator for a phase mirror array including a) a first support member extending perpendicularly from a surface of a mirror, b) a plurality of flexures engaging the first support member with the flexures being generally parallel to the surface of the mirror, c) second and third support members engaging opposing ends of the flexures, at least one of the second and third support members functioning as a first electrode, and d) a second electrode positioned in spaced parallel relationship with the flexures, whereby a voltage impressed across the first electrode and the second electrode causes displacement of the supported mirror on the support structure. The second electrode and one of the flexures can have undulating surfaces which mate in a comb relationship.

1. A phase mirror array comprising:
 a) a plurality of mirrors, 
 b) a plurality of microactuators for the plurality of mirrors, each microactuator comprising: 
 c) a first support member extending perpendicularly from a surface of a mirror, 
 d) a plurality of flexures engaging the first support member with the flexures being generally parallel to the surface of the mirror, 
 e) second and third support members engaging opposing ends of the flexures, at least one of the second and third support members functioning as a first electrode, and 
 f) a second electrode positioned in spaced parallel relationship with the flexures, whereby a voltage impressed across the first electrode and the second electrode causes displacement of the supported mirror on the support structure. 
 
   
   
     2. The phase mirror array as defined by  claim 1  wherein the second electrode has flat surfaces. 
   
   
     3. The phase mirror array as defined by  claim 1  wherein the second electrode and one of the flexures have undulating surfaces which mate in a comb relationship. 
   
   
     4. The phase mirror array as defined by  claim 1  wherein the microactuators comprise doped semiconductor material. 
   
   
     5. The phase mirror array as defined by  claim 1  wherein the plurality of flexures is two. 
   
   
     6. A microactuator for a mirror in a phase mirror array comprising:
 a) a first support member extending perpendicularly from a surface of a mirror, 
 b) a plurality of flexures engaging the first support member with the flexures being generally parallel to the surface of the mirror, 
 c) second and third support members engaging opposing ends of the flexures, at least one of the second and third support members functioning as a first electrode, and 
 d) a second electrode positioned in spaced parallel relationship with the flexures, whereby a voltage impressed across the first electrode and the second electrode causes displacement of the supported mirror on the support structure. 
 
   
   
     7. The microactuator as defined by  claim 6  wherein the second electrode has flat surfaces. 
   
   
     8. The microactuator as defined by  claim 6  wherein the second electrode and one of the flexures have undulating surfaces which mate in a comb relationship. 
   
   
     9. The microactuator as defined by  claim 6  wherein the support members comprise doped semiconductor material. 
   
   
     10. The microactuator as defined by  claim 6  wherein the plurality of flexures is two.