Inventor
BIRRU KRISHNA
US7 patents
Patents
7 patentsUS10760158B2Sep 1, 2020
Ex situ coating of chamber components for semiconductor processing
LAM RES CORP14 citations92
US11365479B2Jun 21, 2022
Ex situ coating of chamber components for semiconductor processing
LAM RES CORP8 citations83
US12227837B2Feb 18, 2025
Ex situ coating of chamber components for semiconductor processing
LAM RES CORP2 citations72
US12163219B2Dec 10, 2024
Ex situ coating of chamber components for semiconductor processing
LAM RES CORP0 citations60
USD1117121SMar 10, 2026
Pedestal for a substrate processing system
LAM RES CORP0 citations53
USD1117120SMar 10, 2026
Pedestal for a substrate processing system
LAM RES CORP0 citations53
US12394608B2Aug 19, 2025
Cleaning system for removing deposits from pump in an exhaust of a substrate processing system
LAM RES CORP0 citations50