Inventor
KHO LEONARD
US5 patents
⚠️ This page may combine multiple inventors who share the name “KHO LEONARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUSD1117121SMar 10, 2026
Pedestal for a substrate processing system
LAM RES CORP0 citations53
USD1117120SMar 10, 2026
Pedestal for a substrate processing system
LAM RES CORP0 citations53
US12394608B2Aug 19, 2025
Cleaning system for removing deposits from pump in an exhaust of a substrate processing system
LAM RES CORP0 citations50
POON ALEX
2 patentsUS8237911B2Aug 7, 2012
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
POON ALEX34 citations90
US8400610B2Mar 19, 2013
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine
POON ALEX32 citations88