Inventor

LITTELINK RUDI

NL2 patents

Patents

2 patents

US12422756B2Sep 23, 2025

Optical system, in particular lithography system

ZEISS CARL SMT GMBH0 citations53

US12105429B2Oct 1, 2024

Optical system with an aperture stop

ZEISS CARL SMT GMBH0 citations39