Optical system, in particular lithography system

Abstract

An optical system, such as a lithography system, comprises: a plate-shaped component, such as a stop element; an optionally frame-shaped holder for holding the component; and a plurality of webs for connecting the plate-shaped component to the holder. The plate-shaped component is releasably connected to the preferably wire-shaped webs. The plate-shaped component is attached to a carrying structure. The webs are releasably connected to the carrying structure.

What is claimed is: 
     
       1. An optical system, comprising:
 a plate-shaped component; 
 a frame-shape holder holding the plate-shaped component; 
 a plurality of webs connecting the plate-shaped component and the frame-shaped holder; and 
 a carrying structure, wherein the plate-shaped component is releasably connected to the webs, 
 the plate-shaped component is attached to the carrying structure, the webs are releasably connected to the carrying structure; 
 a length-setting device configured to set a length a web, 
 and the optical system is a lithography optical system. 
 
     
     
       2. The optical system of  claim 1 , wherein the plate-shaped element comprises a stop element. 
     
     
       3. The optical system of  claim 2 , wherein the webs comprise wire-shaped webs. 
     
     
       4. The optical system of  claim 1 , wherein the webs comprise wire-shaped webs. 
     
     
       5. The optical system of  claim 1 , wherein at least one web spans an opening in the frame-shaped holder. 
     
     
       6. The optical system of  claim 1 , further comprising a spring between a web and the holder. 
     
     
       7. The optical system of  claim 6 , wherein the spring comprises a pretensioned spring. 
     
     
       8. The optical system of  claim 1 , wherein the carrying structure does not project laterally beyond the plate-shaped component. 
     
     
       9. The optical system of  claim 1 , wherein the plate-shaped component comprises a retaining element comprising a retaining section configured to releasably connect to a web. 
     
     
       10. The optical system of  claim 9 , wherein the retaining section comprises a notch configured to clamp to a web. 
     
     
       11. The optical system of  claim 9 , wherein the retaining section defines a notch wrapped with a web. 
     
     
       12. The optical system of  claim 1 , wherein the plate-shaped component comprises a member selected from the group consisting of a depression and a hole, and a web extends through the member. 
     
     
       13. The optical system of  claim 12 , further comprising a seal closing the hole, wherein the seal surrounds the web and fixes the web in the hole. 
     
     
       14. The optical system of  claim 12 , wherein the member comprises a curved section configured to bend the web to fix the web to the plate-shaped component. 
     
     
       15. The optical system of  claim 14 , wherein the curved section has an S-shaped geometry. 
     
     
       16. The optical system of  claim 1 , wherein:
 the plate-shaped component comprises two holes; 
 a web extends from the two holes; and 
 between the two holes, the wire-shaped web is wound around the component in the manner of a loop. 
 
     
     
       17. The optical system of  claim 1 , wherein the plate-shaped element is an obscuration stop configured to block an inner partial region of a beam path of the optical system. 
     
     
       18. The optical system of  claim 1 , wherein the plate-shaped component comprises a metallic material. 
     
     
       19. The optical system of  claim 1 , further comprising:
 a projection system configured to image a photomask onto a wafer, 
 wherein the plate-shaped element is a region of a pupil plane of the projection system.