P

Inventor

CHEN FANG-CHENG

TW26 patents
⚠️ This page may combine multiple inventors who share the name “CHEN FANG-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

17 patents
US6265317B1Jul 24, 2001

Top corner rounding for shallow trench isolation

TAIWAN SEMICONDUCTOR MFG249 citations99
US6869868B2Mar 22, 2005

Method of fabricating a MOSFET device with metal containing gate structures

TAIWAN SEMICONDUCTOR MFG134 citations97
US6174818B1Jan 16, 2001

Method of patterning narrow gate electrode

TAIWAN SEMICONDUCTOR MFG77 citations96
US6001538ADec 14, 1999

Damage free passivation layer etching process

TAIWAN SEMICONDUCTOR MFG72 citations93
US7122412B2Oct 17, 2006

Method of fabricating a necked FINFET device

TAIWAN SEMICONDUCTOR MFG33 citations92
US6867084B1Mar 15, 2005

Gate structure and method of forming the gate dielectric with mini-spacer

TAIWAN SEMICONDUCTOR MFG31 citations92
US6500727B1Dec 31, 2002

Silicon shallow trench etching with round top corner by photoresist-free process

TAIWAN SEMICONDUCTOR MFG25 citations92
US6051505AApr 18, 2000

Plasma etch method for forming metal-fluoropolymer residue free vias through silicon containing dielectric layers

TAIWAN SEMICONDUCTOR MFG31 citations89
US7511349B2Mar 31, 2009

Contact or via hole structure with enlarged bottom critical dimension

TAIWAN SEMICONDUCTOR MFG17 citations84
US6235440B1May 22, 2001

Method to control gate CD

TAIWAN SEMICONDUCTOR MFG11 citations74
US6828237B1Dec 7, 2004

Sidewall polymer deposition method for forming a patterned microelectronic layer

TAIWAN SEMICONDUCTOR MFG8 citations72
US6900104B1May 31, 2005

Method of forming offset spacer manufacturing for critical dimension precision

TAIWAN SEMICONDUCTOR MFG6 citations63
US6969688B2Nov 29, 2005

Wet etchant composition and method for etching HfO2 and ZrO2

TAIWAN SEMICONDUCTOR MFG5 citations58
US7306746B2Dec 11, 2007

Critical dimension control in a semiconductor fabrication process

TAIWAN SEMICONDUCTOR MFG6 citations57
US9129842B2Sep 8, 2015

Formation of silicide contacts in semiconductor devices

TAIWAN SEMICONDUCTOR MFG0 citations52
USRE39913ENov 6, 2007

Method to control gate CD

TAIWAN SEMICONDUCTOR MFG0 citations52
US7307009B2Dec 11, 2007

Phosphoric acid free process for polysilicon gate definition

TAIWAN SEMICONDUCTOR MFG0 citations50

TAIWAN SEMICONDUCTOR MFG CO LTD

8 patents

TSAI WEN-CHI

1 patent