Inventor
TSUBONE TSUNEHIKO
JP95 patents
⚠️ This page may combine multiple inventors who share the name “TSUBONE TSUNEHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
48 patentsUS5685684ANov 11, 1997
Vacuum processing system
HITACHI LTD112 citations98
US5320982AJun 14, 1994
Wafer cooling method and apparatus
HITACHI LTD142 citations98
US5784799AJul 28, 1998
Vacuum processing apparatus for substate wafers
HITACHI LTD59 citations97
US5314509AMay 24, 1994
Vacuum processing apparatus and operating method therefor
HITACHI LTD78 citations97
US4565601AJan 21, 1986
Method and apparatus for controlling sample temperature
HITACHI LTD451 citations97
US6833051B2Dec 21, 2004
Plasma processing apparatus and method
HITACHI LTD33 citations96
US6388382B1May 14, 2002
Plasma processing apparatus and method
HITACHI LTD78 citations96
US6180019B1Jan 30, 2001
Plasma processing apparatus and method
HITACHI LTD51 citations96
US6048434AApr 11, 2000
Substrate holding system including an electrostatic chuck
HITACHI LTD68 citations96
US5906684AMay 25, 1999
Method of holding substrate and substrate holding system
HITACHI LTD54 citations96
US5792304AAug 11, 1998
Method of holding substrate and substrate holding system
HITACHI LTD62 citations96
US5553396ASep 10, 1996
Vacuum processing apparatus and operating method therefor
HITACHI LTD24 citations96
US5445484AAug 29, 1995
Vacuum processing system
HITACHI LTD67 citations96
US5349762ASep 27, 1994
Vacuum processing apparatus and operating method therefor
HITACHI LTD28 citations96
US4824309AApr 25, 1989
Vacuum processing unit and apparatus
HITACHI LTD96 citations95
US6499424B2Dec 31, 2002
Plasma processing apparatus and method
HITACHI LTD23 citations93
US5673750AOct 7, 1997
Vacuum processing method and apparatus
HITACHI LTD37 citations93
US5663884ASep 2, 1997
Multiprocessing apparatus
HITACHI LTD19 citations93
US6756737B2Jun 29, 2004
Plasma processing apparatus and method
HITACHI LTD37 citations92
US6645871B2Nov 11, 2003
Method of holding substrate and substrate holding system
HITACHI LTD20 citations92
US6524428B2Feb 25, 2003
Method of holding substrate and substrate holding system
HITACHI LTD24 citations92
US6336991B1Jan 8, 2002
Method of holding substrate and substrate holding system
HITACHI LTD19 citations92
US6221201B1Apr 24, 2001
Method of holding substrate and substrate holding system
HITACHI LTD18 citations92
US5985035ANov 16, 1999
Method of holding substrate and substrate holding system
HITACHI LTD17 citations92
US5961774AOct 5, 1999
Method of holding substrate and substrate holding system
HITACHI LTD22 citations92
US6217705B1Apr 17, 2001
Method of holding substrate and substrate holding system
HITACHI LTD26 citations91
US5085750AFeb 4, 1992
Plasma treating method and apparatus therefor
HITACHI LTD34 citations91
US4911812AMar 27, 1990
Plasma treating method and apparatus therefor
HITACHI LTD47 citations90
US6301802B1Oct 16, 2001
Vacuum processing apparatus and operating method therefor
HITACHI LTD13 citations86
US5950330ASep 14, 1999
Vacuum processing apparatus and operating method therefor
HITACHI LTD16 citations86
US5661913ASep 2, 1997
Vacuum processing apparatus and operating method therefor
HITACHI LTD11 citations86
US6968630B2Nov 29, 2005
Vacuum processing apparatus and operating method therefor
HITACHI LTD7 citations82
US6899789B2May 31, 2005
Method of holding substrate and substrate holding system
HITACHI LTD11 citations82
US6886272B2May 3, 2005
Vacuum processing apparatus and operating method therefor
HITACHI LTD4 citations82
US6880264B2Apr 19, 2005
Vacuum processing apparatus and operating method therefor
HITACHI LTD4 citations82
US6846363B2Jan 25, 2005
Plasma processing apparatus and method
HITACHI LTD11 citations82
US6676805B2Jan 13, 2004
Method of holding substrate and substrate holding system
HITACHI LTD10 citations82
US6634116B2Oct 21, 2003
Vacuum processing apparatus
HITACHI LTD6 citations82
US6446353B2Sep 10, 2002
Vacuum processing apparatus
HITACHI LTD6 citations82
US6314658B2Nov 13, 2001
Vacuum processing apparatus and operating method therefor
HITACHI LTD5 citations82
US6108929AAug 29, 2000
Vacuum processing apparatus
HITACHI LTD5 citations82
US5457896AOct 17, 1995
Vacuum processing apparatus and operating method therefor
HITACHI LTD9 citations82
US5448470ASep 5, 1995
Multiprocessing apparatus
HITACHI LTD16 citations82
US7367135B2May 6, 2008
Vacuum processing apparatus and operating method therefor
HITACHI LTD2 citations74
US6904699B2Jun 14, 2005
Vacuum processing apparatus and operating method therefor
HITACHI LTD2 citations74
US6662465B2Dec 16, 2003
Vacuum processing apparatus
HITACHI LTD2 citations74
US6655044B2Dec 2, 2003
Vacuum processing apparatus and operating method therefor
HITACHI LTD2 citations74
US6625899B2Sep 30, 2003
Vacuum processing apparatus
HITACHI LTD2 citations74
HITACHI HIGH TECH CORP
1 patentNISHIHATA KOUJI
1 patentShowing the top 50 of 95 patents by PatentIndex Score.