P

Inventor

EDAMURA MANABU

JP55 patents
⚠️ This page may combine multiple inventors who share the name “EDAMURA MANABU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

19 patents
US6245202B1Jun 12, 2001

Plasma treatment device

HITACHI LTD115 citations98
US6833051B2Dec 21, 2004

Plasma processing apparatus and method

HITACHI LTD33 citations96
US6388382B1May 14, 2002

Plasma processing apparatus and method

HITACHI LTD78 citations96
US6180019B1Jan 30, 2001

Plasma processing apparatus and method

HITACHI LTD51 citations96
US5556204ASep 17, 1996

Method and apparatus for detecting the temperature of a sample

HITACHI LTD92 citations96
US5536359AJul 16, 1996

Semiconductor device manufacturing apparatus and method with optical monitoring of state of processing chamber

HITACHI LTD86 citations96
US6499424B2Dec 31, 2002

Plasma processing apparatus and method

HITACHI LTD23 citations93
US6172321B1Jan 9, 2001

Method and apparatus for plasma processing apparatus

HITACHI LTD26 citations93
US6034346AMar 7, 2000

Method and apparatus for plasma processing apparatus

HITACHI LTD27 citations93
US6756737B2Jun 29, 2004

Plasma processing apparatus and method

HITACHI LTD37 citations92
US5259735ANov 9, 1993

Evacuation system and method therefor

HITACHI LTD45 citations92
US8011230B2Sep 6, 2011

Scanning probe microscope

HITACHI LTD10 citations84
US7631548B2Dec 15, 2009

Scanning probe microscope

HITACHI LTD10 citations84
US6911157B2Jun 28, 2005

Plasma processing method and apparatus using dynamic sensing of a plasma environment

HITACHI LTD17 citations84
US6846363B2Jan 25, 2005

Plasma processing apparatus and method

HITACHI LTD11 citations82
US6481370B2Nov 19, 2002

Plasma processsing apparatus

HITACHI LTD10 citations74
US8342008B2Jan 1, 2013

Scanning probe microscope

HITACHI LTD3 citations62
US6812725B2Nov 2, 2004

Semiconductor processing apparatus and wafer sensor module

HITACHI LTD2 citations62
US6793768B2Sep 21, 2004

Plasma-assisted processing apparatus

HITACHI LTD5 citations62

HITACHI CONSTRUCTION MACH CO

14 patents

HITACHI HIGH TECH CORP

4 patents

HIROKI TAKENORI

2 patents

IZUMI SHIHO

2 patents

IMURA SHINYA

1 patent

NISHIKAWA SHINJI

1 patent

EDAMURA MANABU

1 patent

SATAKE HIDETOSHI

1 patent

MIYA GO

1 patent

ISHIDA SEIJI

1 patent

OOKI TAKATOSHI

1 patent

ISHIHARA SHINJI

1 patent

BABA SHUICHI

1 patent

Showing the top 50 of 55 patents by PatentIndex Score.