Inventor
EDAMURA MANABU
JP55 patents
⚠️ This page may combine multiple inventors who share the name “EDAMURA MANABU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
19 patentsUS6245202B1Jun 12, 2001
Plasma treatment device
HITACHI LTD115 citations98
US6833051B2Dec 21, 2004
Plasma processing apparatus and method
HITACHI LTD33 citations96
US6388382B1May 14, 2002
Plasma processing apparatus and method
HITACHI LTD78 citations96
US6180019B1Jan 30, 2001
Plasma processing apparatus and method
HITACHI LTD51 citations96
US5556204ASep 17, 1996
Method and apparatus for detecting the temperature of a sample
HITACHI LTD92 citations96
US5536359AJul 16, 1996
Semiconductor device manufacturing apparatus and method with optical monitoring of state of processing chamber
HITACHI LTD86 citations96
US6499424B2Dec 31, 2002
Plasma processing apparatus and method
HITACHI LTD23 citations93
US6172321B1Jan 9, 2001
Method and apparatus for plasma processing apparatus
HITACHI LTD26 citations93
US6034346AMar 7, 2000
Method and apparatus for plasma processing apparatus
HITACHI LTD27 citations93
US6756737B2Jun 29, 2004
Plasma processing apparatus and method
HITACHI LTD37 citations92
US5259735ANov 9, 1993
Evacuation system and method therefor
HITACHI LTD45 citations92
US8011230B2Sep 6, 2011
Scanning probe microscope
HITACHI LTD10 citations84
US7631548B2Dec 15, 2009
Scanning probe microscope
HITACHI LTD10 citations84
US6911157B2Jun 28, 2005
Plasma processing method and apparatus using dynamic sensing of a plasma environment
HITACHI LTD17 citations84
US6846363B2Jan 25, 2005
Plasma processing apparatus and method
HITACHI LTD11 citations82
US6481370B2Nov 19, 2002
Plasma processsing apparatus
HITACHI LTD10 citations74
US8342008B2Jan 1, 2013
Scanning probe microscope
HITACHI LTD3 citations62
US6812725B2Nov 2, 2004
Semiconductor processing apparatus and wafer sensor module
HITACHI LTD2 citations62
US6793768B2Sep 21, 2004
Plasma-assisted processing apparatus
HITACHI LTD5 citations62
HITACHI CONSTRUCTION MACH CO
14 patentsUS11230824B2Jan 25, 2022
Work machine
HITACHI CONSTRUCTION MACH CO8 citations85
US10301794B2May 28, 2019
Construction machine
HITACHI CONSTRUCTION MACH CO13 citations84
US11391011B2Jul 19, 2022
Hydraulic excavator
HITACHI CONSTRUCTION MACH CO2 citations73
US11168459B2Nov 9, 2021
Work machine
HITACHI CONSTRUCTION MACH CO2 citations73
US11149411B2Oct 19, 2021
Work machine
HITACHI CONSTRUCTION MACH CO4 citations73
US11053661B2Jul 6, 2021
Work machine
HITACHI CONSTRUCTION MACH CO2 citations73
US10557251B2Feb 11, 2020
Work machine
HITACHI CONSTRUCTION MACH CO3 citations73
US11041288B2Jun 22, 2021
Work machine
HITACHI CONSTRUCTION MACH CO4 citations71
US10760245B2Sep 1, 2020
Drive control device for construction machine
HITACHI CONSTRUCTION MACH CO5 citations71
US10323388B2Jun 18, 2019
Display system for construction machine
HITACHI CONSTRUCTION MACH CO5 citations71
US11851854B2Dec 26, 2023
Work machine
HITACHI CONSTRUCTION MACH CO0 citations52
US11261578B2Mar 1, 2022
Work machine
HITACHI CONSTRUCTION MACH CO0 citations52
US11091900B2Aug 17, 2021
Construction machine
HITACHI CONSTRUCTION MACH CO0 citations52
US10060450B2Aug 28, 2018
Hydraulic control device for work machine
HITACHI CONSTRUCTION MACH CO1 citations52
HITACHI HIGH TECH CORP
4 patentsUS7194821B2Mar 27, 2007
Vacuum processing apparatus and vacuum processing method
HITACHI HIGH TECH CORP12 citations83
US7744721B2Jun 29, 2010
Plasma processing apparatus
HITACHI HIGH TECH CORP7 citations74
US6850012B2Feb 1, 2005
Plasma processing apparatus
HITACHI HIGH TECH CORP10 citations74
US7713756B2May 11, 2010
Apparatus and method for plasma etching
HITACHI HIGH TECH CORP2 citations63
HIROKI TAKENORI
2 patentsIZUMI SHIHO
2 patentsIMURA SHINYA
1 patentNISHIKAWA SHINJI
1 patentEDAMURA MANABU
1 patentSATAKE HIDETOSHI
1 patentMIYA GO
1 patentISHIDA SEIJI
1 patentOOKI TAKATOSHI
1 patentISHIHARA SHINJI
1 patentBABA SHUICHI
1 patentShowing the top 50 of 55 patents by PatentIndex Score.