Inventor
MASE YASUKAZU
JP19 patents
⚠️ This page may combine multiple inventors who share the name “MASE YASUKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
18 patentsUS5055906AOct 8, 1991
Semiconductor device having a composite insulating interlayer
TOSHIBA KK67 citations95
US5169407ADec 8, 1992
Method of determining end of cleaning of semiconductor manufacturing apparatus
TOSHIBA KK50 citations92
US5100476AMar 31, 1992
Method and apparatus for cleaning semiconductor devices
TOSHIBA KK49 citations92
US5044311ASep 3, 1991
Plasma chemical vapor deposition apparatus
TOSHIBA KK27 citations92
US5016663AMay 21, 1991
Method of determining end of cleaning of semiconductor manufacturing apparatus
TOSHIBA KK39 citations92
US4634496AJan 6, 1987
Method for planarizing the surface of an interlayer insulating film in a semiconductor device
TOSHIBA KK52 citations92
US4613888ASep 23, 1986
Semiconductor device of multilayer wiring structure
TOSHIBA KK30 citations92
US5258328ANov 2, 1993
Method of forming multilayered wiring structure of semiconductor device
TOSHIBA KK33 citations91
US6015754AJan 18, 2000
Chemical mechanical polishing apparatus and method
TOSHIBA KK16 citations83
US4857141AAug 15, 1989
Method of forming holes in semiconductor integrated circuit device
TOSHIBA KK20 citations82
US4728627AMar 1, 1988
Method of making multilayered interconnects using hillock studs formed by sintering
TOSHIBA KK15 citations74
US5175115ADec 29, 1992
Method of controlling metal thin film formation conditions
TOSHIBA KK10 citations73
US5103287AApr 7, 1992
Multi-layered wiring structure of semiconductor integrated circuit device
TOSHIBA KK12 citations73
US4952528AAug 28, 1990
Photolithographic method for manufacturing semiconductor wiring patterns
TOSHIBA KK19 citations73
US5523627AJun 4, 1996
Wiring pattern of semiconductor integrated circuit device
TOSHIBA KK7 citations72
US5126819AJun 30, 1992
Wiring pattern of semiconductor integrated circuit device
TOSHIBA KK9 citations72
US5411916AMay 2, 1995
Method for patterning wirings of semiconductor integrated circuit device
TOSHIBA KK2 citations61
USRE37059EFeb 20, 2001
Wiring pattern of semiconductor integrated circuit device
TOSHIBA KK0 citations51