Inventor
ROZBICKI ROBERT
US36 patents
⚠️ This page may combine multiple inventors who share the name “ROZBICKI ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
14 patentsUS7186648B1Mar 6, 2007
Barrier first method for single damascene trench applications
NOVELLUS SYSTEMS INC553 citations99
US6764940B1Jul 20, 2004
Method for depositing a diffusion barrier for copper interconnect applications
NOVELLUS SYSTEMS INC139 citations99
US6607977B1Aug 19, 2003
Method of depositing a diffusion barrier for copper interconnect applications
NOVELLUS SYSTEMS INC159 citations99
US6642146B1Nov 4, 2003
Method of depositing copper seed on semiconductor substrates
NOVELLUS SYSTEMS INC121 citations98
US7842605B1Nov 30, 2010
Atomic layer profiling of diffusion barrier and metal seed layers
NOVELLUS SYSTEMS INC16 citations93
US7732314B1Jun 8, 2010
Method for depositing a diffusion barrier for copper interconnect applications
NOVELLUS SYSTEMS INC34 citations93
US7510634B1Mar 31, 2009
Apparatus and methods for deposition and/or etch selectivity
NOVELLUS SYSTEMS INC33 citations93
US8679972B1Mar 25, 2014
Method of depositing a diffusion barrier for copper interconnect applications
NOVELLUS SYSTEMS INC19 citations92
US7682966B1Mar 23, 2010
Multistep method of depositing metal seed layers
NOVELLUS SYSTEMS INC43 citations92
US7855147B1Dec 21, 2010
Methods and apparatus for engineering an interface between a diffusion barrier layer and a seed layer
NOVELLUS SYSTEMS INC39 citations91
US7781327B1Aug 24, 2010
Resputtering process for eliminating dielectric damage
NOVELLUS SYSTEMS INC28 citations91
US7745332B1Jun 29, 2010
PVD-based metallization methods for fabrication of interconnections in semiconductor devices
NOVELLUS SYSTEMS INC24 citations90
US9099535B1Aug 4, 2015
Method of depositing a diffusion barrier for copper interconnect applications
NOVELLUS SYSTEMS INC4 citations84
US8043484B1Oct 25, 2011
Methods and apparatus for resputtering process that improves barrier coverage
NOVELLUS SYSTEMS INC15 citations84
VIEW INC
11 patentsUS9007674B2Apr 14, 2015
Defect-mitigation layers in electrochromic devices
VIEW INC77 citations99
US10591797B2Mar 17, 2020
Electrochromic devices
VIEW INC22 citations98
US10288969B2May 14, 2019
Defect-mitigation layers in electrochromic devices
VIEW INC40 citations98
US10088729B2Oct 2, 2018
Electrochromic devices
VIEW INC32 citations98
US9720298B2Aug 1, 2017
Electrochromic devices
VIEW INC35 citations98
US9164346B2Oct 20, 2015
Electrochromic devices
VIEW INC43 citations98
US9477129B2Oct 25, 2016
Fabrication of low defectivity electrochromic devices
VIEW INC39 citations97
US9229291B2Jan 5, 2016
Defect-mitigation layers in electrochromic devices
VIEW INC23 citations96
US11525181B2Dec 13, 2022
Electrochromic devices
VIEW INC11 citations94
US11898233B2Feb 13, 2024
Electrochromic devices
VIEW INC3 citations86
US12043890B2Jul 23, 2024
Electrochromic devices
VIEW INC4 citations75
WANG ZHONGCHUN
5 patentsUS8764950B2Jul 1, 2014
Electrochromic devices
WANG ZHONGCHUN167 citations99
US8582193B2Nov 12, 2013
Electrochromic devices
WANG ZHONGCHUN115 citations99
US8300298B2Oct 30, 2012
Electrochromic devices
WANG ZHONGCHUN185 citations99
US8764951B2Jul 1, 2014
Electrochromic devices
WANG ZHONGCHUN134 citations98
US8749868B2Jun 10, 2014
Electrochromic devices
WANG ZHONGCHUN45 citations98