P

Inventor

ROZBICKI ROBERT

US36 patents
⚠️ This page may combine multiple inventors who share the name “ROZBICKI ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

14 patents
US7186648B1Mar 6, 2007

Barrier first method for single damascene trench applications

NOVELLUS SYSTEMS INC553 citations99
US6764940B1Jul 20, 2004

Method for depositing a diffusion barrier for copper interconnect applications

NOVELLUS SYSTEMS INC139 citations99
US6607977B1Aug 19, 2003

Method of depositing a diffusion barrier for copper interconnect applications

NOVELLUS SYSTEMS INC159 citations99
US6642146B1Nov 4, 2003

Method of depositing copper seed on semiconductor substrates

NOVELLUS SYSTEMS INC121 citations98
US7842605B1Nov 30, 2010

Atomic layer profiling of diffusion barrier and metal seed layers

NOVELLUS SYSTEMS INC16 citations93
US7732314B1Jun 8, 2010

Method for depositing a diffusion barrier for copper interconnect applications

NOVELLUS SYSTEMS INC34 citations93
US7510634B1Mar 31, 2009

Apparatus and methods for deposition and/or etch selectivity

NOVELLUS SYSTEMS INC33 citations93
US8679972B1Mar 25, 2014

Method of depositing a diffusion barrier for copper interconnect applications

NOVELLUS SYSTEMS INC19 citations92
US7682966B1Mar 23, 2010

Multistep method of depositing metal seed layers

NOVELLUS SYSTEMS INC43 citations92
US7855147B1Dec 21, 2010

Methods and apparatus for engineering an interface between a diffusion barrier layer and a seed layer

NOVELLUS SYSTEMS INC39 citations91
US7781327B1Aug 24, 2010

Resputtering process for eliminating dielectric damage

NOVELLUS SYSTEMS INC28 citations91
US7745332B1Jun 29, 2010

PVD-based metallization methods for fabrication of interconnections in semiconductor devices

NOVELLUS SYSTEMS INC24 citations90
US9099535B1Aug 4, 2015

Method of depositing a diffusion barrier for copper interconnect applications

NOVELLUS SYSTEMS INC4 citations84
US8043484B1Oct 25, 2011

Methods and apparatus for resputtering process that improves barrier coverage

NOVELLUS SYSTEMS INC15 citations84

VIEW INC

11 patents

WANG ZHONGCHUN

5 patents

KOZLOWSKI MARK

2 patents

UNIV BOSTON

1 patent

ROZBICKI ROBERT

1 patent

PRADHAN ANSHU A

1 patent

KLAWUHN ERICH R

1 patent