Inventor · disambiguated record
Marco Johannes Annemarie Pieters
Also filed as: PIETERS MARCO · PIETERS MARCO JOHANNES ANNEMAR · PIETERS MARCO JOHANNES ANNEMARIE
4 granted patents·7 citations·filing 2004–2018
65Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV4
Top patents by PatentIndex Score
4 records- 0182US10001711B2Inspection method, lithographic apparatus, mask and substrateASML NETHERLANDS BV·Filed 2014·Granted Jun 19, 2018·3 cites·23 claims
- 0276US10394137B2Inspection method, lithographic apparatus, mask and substrateASML NETHERLANDS BV·Filed 2018·Granted Aug 27, 2019·1 cites·24 claims
- 0366US7355675B2Method for measuring information about a substrate, and a substrate for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Apr 8, 2008·3 cites·64 claims
- 0435US7209214B2Lithographic apparatus focus test method and system, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 24, 2007·0 cites·26 claims
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