Inventor
RAJ GOVINDA
IN32 patents
⚠️ This page may combine multiple inventors who share the name “RAJ GOVINDA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
30 patentsUS10648788B2May 12, 2020
Substrate distance monitoring
APPLIED MATERIALS INC337 citations98
US10190701B2Jan 29, 2019
Corrosion control for chamber components
APPLIED MATERIALS INC367 citations97
US9349630B2May 24, 2016
Methods and apparatus for electrostatic chuck repair and refurbishment
APPLIED MATERIALS INC14 citations83
US11114326B2Sep 7, 2021
Substrate chucking and dechucking methods
APPLIED MATERIALS INC6 citations71
US10879046B2Dec 29, 2020
Substrate support with real time force and film stress control
APPLIED MATERIALS INC2 citations71
US9613846B2Apr 4, 2017
Pad design for electrostatic chuck surface
APPLIED MATERIALS INC5 citations71
US10177014B2Jan 8, 2019
Thermal radiation barrier for substrate processing chamber components
APPLIED MATERIALS INC2 citations70
US11560913B2Jan 24, 2023
Brazed joint and semiconductor processing chamber component having the same
APPLIED MATERIALS INC2 citations66
US12309888B2May 20, 2025
Heated substrate support
APPLIED MATERIALS INC0 citations62
US11330673B2May 10, 2022
Heated substrate support
APPLIED MATERIALS INC1 citations62
US10290459B2May 14, 2019
Magnetron having enhanced cooling characteristics
APPLIED MATERIALS INC1 citations62
US12424413B2Sep 23, 2025
Substrate support with real time force and film stress control
APPLIED MATERIALS INC0 citations61
US11915913B2Feb 27, 2024
Substrate support with real time force and film stress control
APPLIED MATERIALS INC0 citations61
US11676802B2Jun 13, 2023
Substrate support with real time force and film stress control
APPLIED MATERIALS INC0 citations61
US11569069B2Jan 31, 2023
3D printed chamber components configured for lower film stress and lower operating temperature
APPLIED MATERIALS INC0 citations61
US10662529B2May 26, 2020
Cooled gas feed block with baffle and nozzle for HDP-CVD
APPLIED MATERIALS INC1 citations61
US10553473B2Feb 4, 2020
Edge ring for a substrate processing chamber
APPLIED MATERIALS INC1 citations61
US11417561B2Aug 16, 2022
Edge ring for a substrate processing chamber
APPLIED MATERIALS INC0 citations60
US11761901B2Sep 19, 2023
Apparatus and method for inspecting lamps
APPLIED MATERIALS INC0 citations59
US11460413B2Oct 4, 2022
Apparatus and method for inspecting lamps
APPLIED MATERIALS INC0 citations59
US11054317B2Jul 6, 2021
Method and apparatus for direct measurement of chucking force on an electrostatic chuck
APPLIED MATERIALS INC0 citations59
US12027388B2Jul 2, 2024
Conical coil for rapid thermal anneal lamps
APPLIED MATERIALS INC0 citations58
US10168229B2Jan 1, 2019
EMI/RF shielding of thermocouples
APPLIED MATERIALS INC1 citations55
US10141153B2Nov 27, 2018
Magnetron having enhanced cooling characteristics
APPLIED MATERIALS INC0 citations52
US10049908B2Aug 14, 2018
Methods and apparatus for electrostatic chuck repair and refurbishment
APPLIED MATERIALS INC1 citations51
US10777391B2Sep 15, 2020
3D printed chamber components configured for lower film stress and lower operating temperature
APPLIED MATERIALS INC0 citations50
US10005025B2Jun 26, 2018
Corrosion resistant abatement system
APPLIED MATERIALS INC0 citations47
US12198967B2Jan 14, 2025
Substrate support designs for a deposition chamber
APPLIED MATERIALS INC0 citations44
US10515843B2Dec 24, 2019
Amalgamated cover ring
APPLIED MATERIALS INC0 citations40
US11694879B2Jul 4, 2023
Component, method of manufacturing the component, and method of cleaning the component
APPLIED MATERIALS INC0 citations38