Inventor
Pan Kuan-Ting
TW100 patents
Patents
50 patentsUS10181426B1Jan 15, 2019
Etch profile control of polysilicon structures of semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD15 citations94
US11616062B2Mar 28, 2023
Gate isolation for multigate device
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations86
US10943830B2Mar 9, 2021
Self-aligned structure for semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD13 citations86
US10825918B2Nov 3, 2020
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US10290635B2May 14, 2019
Buried interconnect conductor
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US12272690B2Apr 8, 2025
Gate isolation for multigate device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations75
US12199097B2Jan 14, 2025
Seam free isolation structures and method for making the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations75
US11948973B2Apr 2, 2024
Gate-all-around field-effect transistor device
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations75
US12080776B2Sep 3, 2024
Field effect transistor with fin isolation structure and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11916122B2Feb 27, 2024
Gate all around transistor with dual inner spacers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11735482B2Aug 22, 2023
Semiconductor device structure and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11637102B2Apr 25, 2023
Gate isolation for multigate device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11621195B2Apr 4, 2023
Semiconductor device and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11563106B2Jan 24, 2023
Formation method of isolation feature of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11502187B2Nov 15, 2022
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11355396B2Jun 7, 2022
Method of forming a semiconductor structure including laterally etching semiconductor material in fin recess region and depositing metal gate therein
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11355398B2Jun 7, 2022
Semiconductor device structure and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11329165B2May 10, 2022
Structure and formation method of semiconductor device with isolation structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11328963B2May 10, 2022
Multi-gate device and related methods
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11114529B2Sep 7, 2021
Gate-all-around field-effect transistor device
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10985277B2Apr 20, 2021
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10985072B2Apr 20, 2021
Etch profile control of polysilicon structures of semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10886269B2Jan 5, 2021
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10658245B2May 19, 2020
Etch profile control of polysilicon structures of semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10658490B2May 19, 2020
Structure and formation method of isolation feature of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10516051B2Dec 24, 2019
FinFET and method of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10510873B2Dec 17, 2019
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9741821B1Aug 22, 2017
Two-step dummy gate formation
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations73
US12593475B2Mar 31, 2026
Field effect transistor with isolation structure and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12563816B2Feb 24, 2026
Method for forming sidewall spacers disposed above mask layer and semiconductor devices fabricated thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12557317B2Feb 17, 2026
Semiconductor devices with fin-top hard mask and methods for fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12520518B2Jan 6, 2026
Semiconductor device structure and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12477802B2Nov 18, 2025
Structure of isolation feature of semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12471316B2Nov 11, 2025
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12439680B2Oct 7, 2025
Multi-gate device and related methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12419094B2Sep 16, 2025
Semiconductor device with trimmed channel region and method of making the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12349407B2Jul 1, 2025
Method for manufacturing semiconductor structure with dielectric feature
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12349456B2Jul 1, 2025
Semiconductor device structure and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12349378B2Jul 1, 2025
Semiconductor devices with Fin-top hard mask and methods for fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12324225B2Jun 3, 2025
Self-aligned structure for semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12237405B2Feb 25, 2025
Semiconductor devices and methods of manufacturing thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12165926B2Dec 10, 2024
FinFET device structure having dielectric features between a plurality of gate electrodes and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12148815B2Nov 19, 2024
Fin field effect transistor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12142692B2Nov 12, 2024
Semiconductor device with isolation structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12107153B2Oct 1, 2024
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12107006B2Oct 1, 2024
Method for manufacturing semiconductor structure with dielectric feature
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US12087636B2Sep 10, 2024
Semiconductor device including a FinFET structure and method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12087768B2Sep 10, 2024
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12057507B2Aug 6, 2024
Method for manufacturing semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12051693B2Jul 30, 2024
Method for manufacturing semiconductor structure with isolation strips
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
Showing the top 50 of 100 patents by PatentIndex Score.