Inventor
LIN TIEN-LU
TW102 patents
⚠️ This page may combine multiple inventors who share the name “LIN TIEN-LU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
48 patentsUS9390965B2Jul 12, 2016
Air-gap forming techniques for interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD12 citations93
US11282920B2Mar 22, 2022
Semiconductor device with air gap on gate structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US10290580B2May 14, 2019
Hybrid copper structure for advance interconnect usage
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10276498B2Apr 30, 2019
Interconnect structure with air-gaps
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US10109519B2Oct 23, 2018
Method of semiconductor integrated circuit fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9837354B2Dec 5, 2017
Hybrid copper structure for advance interconnect usage
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9716035B2Jul 25, 2017
Combination interconnect structure and methods of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD11 citations84
US9607881B2Mar 28, 2017
Insulator void aspect ratio tuning by selective deposition
TAIWAN SEMICONDUCTOR MFG CO LTD13 citations84
US9559134B2Jan 31, 2017
Deep trench spacing isolation for complementary metal-oxide-semiconductor (CMOS) image sensors
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US12040273B2Jul 16, 2024
Semiconductor device with multi-layer dielectric
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11842962B2Dec 12, 2023
Interconnect structure with air-gaps
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11637186B2Apr 25, 2023
Field effect transistor having gate contact and source/drain contact separated by a gap
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11335592B2May 17, 2022
Contact resistance between via and conductive line
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11264284B2Mar 1, 2022
Semiconductor device and method of fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10943829B2Mar 9, 2021
Slot contacts and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10867863B1Dec 15, 2020
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10818597B2Oct 27, 2020
Hybrid copper structure for advance interconnect usage
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10755964B1Aug 25, 2020
Source/drain isolation structure and methods thereof
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10700005B2Jun 30, 2020
Interconnect structure with air gaps
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10177242B2Jan 8, 2019
Semiconductor arrangement and formation thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9698242B2Jul 4, 2017
Semiconductor arrangement and formation thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9633897B2Apr 25, 2017
Air-gap forming techniques for interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9583383B2Feb 28, 2017
Air gap forming techniques based on anodic alumina for interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9576896B2Feb 21, 2017
Semiconductor arrangement and formation thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9455178B2Sep 27, 2016
Method of semiconductor integrated circuit fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US9412652B2Aug 9, 2016
Air gap forming techniques based on anodic alumina for interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11715761B2Aug 1, 2023
Semiconductor device with air gap on gate structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9735232B2Aug 15, 2017
Method for manufacturing a semiconductor structure having a trench with high aspect ratio
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US9583434B2Feb 28, 2017
Metal line structure and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9564396B2Feb 7, 2017
Semiconductor device and process
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12464764B2Nov 4, 2025
Low parasitic capacitance contact structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12446275B2Oct 14, 2025
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12389665B2Aug 12, 2025
Semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12159922B2Dec 3, 2024
Method of fabricating semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12131942B2Oct 29, 2024
Source/drain isolation structure and methods thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12125912B2Oct 22, 2024
Semiconductor device structure and method for forming the same preliminary class
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12087860B2Sep 10, 2024
Methods of forming contact features in field-effect transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12057398B2Aug 6, 2024
Semiconductor device with multi-layer dielectric and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12009265B2Jun 11, 2024
Slot contacts and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12002756B2Jun 4, 2024
Butted contacts and methods of fabricating the same in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11908744B2Feb 20, 2024
Semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11694921B2Jul 4, 2023
Source/drain isolation structure and methods thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11658244B2May 23, 2023
Semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11637064B2Apr 25, 2023
Advanced metal connection with metal cut
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11631749B2Apr 18, 2023
Method of fabricating semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11605736B2Mar 14, 2023
Low-capacitance structures and processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11581403B2Feb 14, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11532518B2Dec 20, 2022
Slot contacts and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
TAIWAN SEMICONDUCTOR MFG
2 patentsShowing the top 50 of 102 patents by PatentIndex Score.