Inventor
KALINOVSKI ILIA
US10 patents
⚠️ This page may combine multiple inventors who share the name “KALINOVSKI ILIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
4 patentsUS7288484B1Oct 30, 2007
Photoresist strip method for low-k dielectrics
NOVELLUS SYSTEMS INC53 citations94
US7585777B1Sep 8, 2009
Photoresist strip method for low-k dielectrics
NOVELLUS SYSTEMS INC25 citations90
USD641829SJul 19, 2011
Plasma reactor showerhead face plate having concentric ridge pattern
NOVELLUS SYSTEMS INC16 citations77
US9564344B2Feb 7, 2017
Ultra low silicon loss high dose implant strip
NOVELLUS SYSTEMS INC2 citations69
LAM RES CORP
4 patentsUS10267728B2Apr 23, 2019
Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system
LAM RES CORP3 citations72
US10068781B2Sep 4, 2018
Systems and methods for drying high aspect ratio structures without collapse using sacrificial bracing material that is removed using hydrogen-rich plasma
LAM RES CORP4 citations66
US12467147B2Nov 11, 2025
Vapor cleaning of substrate surfaces
LAM RES CORP0 citations59
US10109476B2Oct 23, 2018
Substrate processing method for depositing a barrier layer to prevent photoresist poisoning
LAM RES CORP0 citations51