Inventor

ZOU ZHENG

SG19 patents

⚠️ This page may combine multiple inventors who share the name “ZOU ZHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZOU ZHENG

GLOBALFOUNDRIES SG PTE LTD

Small pitch and high density contact array

Integrated circuits with memory cells and methods of manufacturing the same

CD control

Integrated circuits with memory cells and methods of manufacturing the same

CD control

Method for forming through silicon via with wafer backside protection

Multi-variable regression for metrology

Filament free silicide formation

HANGZHOU HUICANG INFORMATION TECH COMPANY LIMITED

Rack apparatus, two-wheel drive carriage and automated storage and distribution system

Track apparatus, delivery shuttle car and material handling system

CHARTERED SEMICONDUCTOR MFG

Method of forming almost L-shaped spacer for improved ILD gap fill

Method to reduce trench cone formation in the fabrication of shallow trench isolations

RAO XUESONG

Step-like spacer profile

Spacer profile engineering using films with continuously increased etch rate from inner to outer surface

LIU HUANG

Integration of eNVM, RMG, and HKMG modules

LEONG LUP SAN

Method for forming through silicon via with wafer backside protection

LI LIANG

STI CMP under polish monitoring

LIU HUI

Litho scanner alignment signal improvement

ZHOU WENZHAN

Statistical optical proximity correction