Inventor
BRILLHART PAUL
US35 patents
⚠️ This page may combine multiple inventors who share the name “BRILLHART PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
30 patentsUS7649729B2Jan 19, 2010
Electrostatic chuck assembly
APPLIED MATERIALS INC45 citations92
US9845550B2Dec 19, 2017
Upper dome with injection assembly
APPLIED MATERIALS INC7 citations84
US9322097B2Apr 26, 2016
EPI base ring
APPLIED MATERIALS INC7 citations84
USD716240SOct 28, 2014
Lower chamber liner
APPLIED MATERIALS INC16 citations84
USD711331SAug 19, 2014
Upper chamber liner
APPLIED MATERIALS INC15 citations84
US10930543B2Feb 23, 2021
Thermal processing susceptor
APPLIED MATERIALS INC4 citations83
US10062598B2Aug 28, 2018
Thermal processing susceptor
APPLIED MATERIALS INC7 citations83
US10727093B2Jul 28, 2020
Light pipe window structure for low pressure thermal processes
APPLIED MATERIALS INC3 citations73
US10202707B2Feb 12, 2019
Substrate processing system with lamphead having temperature management
APPLIED MATERIALS INC4 citations73
US10119192B2Nov 6, 2018
EPI base ring
APPLIED MATERIALS INC3 citations73
US9842753B2Dec 12, 2017
Absorbing lamphead face
APPLIED MATERIALS INC2 citations73
US9748121B2Aug 29, 2017
Thermal coupled quartz dome heat sink
APPLIED MATERIALS INC2 citations73
US9580835B2Feb 28, 2017
Multizone control of lamps in a conical lamphead using pyrometers
APPLIED MATERIALS INC2 citations73
US9532401B2Dec 27, 2016
Susceptor support shaft with uniformity tuning lenses for EPI process
APPLIED MATERIALS INC5 citations73
US10883190B2Jan 5, 2021
Apparatus and methods for alignment of a susceptor
APPLIED MATERIALS INC4 citations72
US10269614B2Apr 23, 2019
Susceptor design to reduce edge thermal peak
APPLIED MATERIALS INC3 citations72
US9768043B2Sep 19, 2017
Quartz upper and lower domes
APPLIED MATERIALS INC4 citations72
US9832816B2Nov 28, 2017
Absorbing reflector for semiconductor processing chamber
APPLIED MATERIALS INC2 citations69
US12400904B2Aug 26, 2025
Thermal processing susceptor
APPLIED MATERIALS INC0 citations62
US11859307B2Jan 2, 2024
Apparatus and methods for alignment of a susceptor
APPLIED MATERIALS INC0 citations62
US11848226B2Dec 19, 2023
Thermal processing susceptor
APPLIED MATERIALS INC0 citations62
US10458040B2Oct 29, 2019
Upper dome with injection assembly
APPLIED MATERIALS INC1 citations62
US10077508B2Sep 18, 2018
Multizone control of lamps in a conical lamphead using pyrometers
APPLIED MATERIALS INC1 citations62
US9230837B2Jan 5, 2016
Multizone control of lamps in a conical lamphead using pyrometers
APPLIED MATERIALS INC1 citations62
US9863043B2Jan 9, 2018
Window cooling using compliant material
APPLIED MATERIALS INC0 citations52
US9814099B2Nov 7, 2017
Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same
APPLIED MATERIALS INC1 citations52
US9711382B2Jul 18, 2017
Dome cooling using compliant material
APPLIED MATERIALS INC0 citations52
US9570275B2Feb 14, 2017
Heated showerhead assembly
APPLIED MATERIALS INC0 citations52
US10306708B2May 28, 2019
Absorbing reflector for semiconductor processing chamber
APPLIED MATERIALS INC0 citations48
US12592364B2Mar 31, 2026
Fluoride coating to improve chamber performance
APPLIED MATERIALS INC0 citations46