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Lower chamber liner

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Assignee: APPLIED MATERIALS INCPriority: Nov 7, 2013Filed: Nov 7, 2013Granted: Oct 28, 2014
Est. expiryNov 7, 2033(~7.3 yrs left)· nominal 20-yr term from priority
Inventors:Shu-Kwan LauMehmet Tugrul SamirAnzhong ChangPaul BrillhartRichard O. Collins
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PatentIndex Score
16
Cited by
27
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a lower chamber liner, as shown and described.

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