Inventor · disambiguated record
Mehmet Tugrul Samir
Also filed as: SAMIR MEHMET · SAMIR MEHMET TUGRUL
44 granted patents·17 pending applications·461 citations·filing 2011–2022
98Inventor score
Top patents by PatentIndex Score
61 records- 0199US10679870B2Semiconductor processing chamber multistage mixing apparatusAPPLIED MATERIALS INC·Filed 2018·Granted Jun 9, 2020·32 cites·19 claims
- 0298US10699921B2Semiconductor processing chamber multistage mixing apparatusAPPLIED MATERIALS INC·Filed 2019·Granted Jun 30, 2020·32 cites·15 claims
- 0398US9695508B2Liner assembly for chemical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2015·Granted Jul 4, 2017·18 cites·20 claims
- 0498US8980005B2Liner assembly for chemical vapor deposition chamberCARLSON DAVID K·Filed 2011·Granted Mar 17, 2015·220 cites·20 claims
- 0591US9553002B2Flow controlled liner having spatially distributed gas passagesAPPLIED MATERIALS INC·Filed 2014·Granted Jan 24, 2017·9 cites·16 claims
- 0689US11915950B2Multi-zone semiconductor substrate supportsAPPLIED MATERIALS INC·Filed 2022·Granted Feb 27, 2024·1 cites·20 claims
- 0789US10577690B2Gas distribution showerhead for semiconductor processingAPPLIED MATERIALS INC·Filed 2017·Granted Mar 3, 2020·2 cites·20 claims
- 0889US10170342B2Flow controlled liner having spatially distributed gas passagesAPPLIED MATERIALS INC·Filed 2017·Granted Jan 1, 2019·4 cites·20 claims
- 0989US9842748B2Flow controlled liner having spatially distributed gas passagesAPPLIED MATERIALS INC·Filed 2017·Granted Dec 12, 2017·4 cites·12 claims
- 1088US8772055B1Multizone control of lamps in a conical lamphead using pyrometersRANISH JOSEPH M·Filed 2013·Granted Jul 8, 2014·6 cites·5 claims
- 1187US9905454B2Substrate transfer mechanismsAPPLIED MATERIALS INC·Filed 2015·Granted Feb 27, 2018·4 cites·13 claims
- 1287US9322097B2EPI base ringAPPLIED MATERIALS INC·Filed 2013·Granted Apr 26, 2016·7 cites·14 claims
- 1385US9499905B2Methods and apparatus for the deposition of materials on a substrateSAMIR MEHMET TUGRUL·Filed 2012·Granted Nov 22, 2016·5 cites·20 claims
- 1484US10964512B2Semiconductor processing chamber multistage mixing apparatus and methodsAPPLIED MATERIALS INC·Filed 2018·Granted Mar 30, 2021·3 cites·20 claims
- 1583US11276559B2Semiconductor processing chamber for multiple precursor flowAPPLIED MATERIALS INC·Filed 2017·Granted Mar 15, 2022·3 cites·18 claims
- 1683US9123765B2Susceptor support shaft for improved wafer temperature uniformity and process repeatabilityAPPLIED MATERIALS INC·Filed 2014·Granted Sep 1, 2015·5 cites·20 claims
- 1782US10760161B2Inject insert for EPI chamberAPPLIED MATERIALS INC·Filed 2014·Granted Sep 1, 2020·2 cites·13 claims
- 1882US10119192B2EPI base ringAPPLIED MATERIALS INC·Filed 2016·Granted Nov 6, 2018·3 cites·15 claims
- 1982US9768043B2Quartz upper and lower domesAPPLIED MATERIALS INC·Filed 2013·Granted Sep 19, 2017·4 cites·19 claims
- 2082US9532401B2Susceptor support shaft with uniformity tuning lenses for EPI processAPPLIED MATERIALS INC·Filed 2014·Granted Dec 27, 2016·5 cites·17 claims
- 2182USD717746SLower chamber linerAPPLIED MATERIALS INC·Filed 2013·Granted Nov 18, 2014·26 cites·1 claims
- 2281US9580835B2Multizone control of lamps in a conical lamphead using pyrometersAPPLIED MATERIALS INC·Filed 2016·Granted Feb 28, 2017·2 cites·9 claims
- 2378US9814099B2Substrate support with surface feature for reduced reflection and manufacturing techniques for producing sameAPPLIED MATERIALS INC·Filed 2014·Granted Nov 7, 2017·1 cites·20 claims
- 2477US10132003B2Heating modulators to improve epi uniformity tuningAPPLIED MATERIALS INC·Filed 2017·Granted Nov 20, 2018·2 cites·22 claims
- 2577US9870919B2Process chamber having separate process gas and purge gas regionsRANISH JOSEPH M·Filed 2013·Granted Jan 16, 2018·3 cites·9 claims
- 2675US10077508B2Multizone control of lamps in a conical lamphead using pyrometersAPPLIED MATERIALS INC·Filed 2017·Granted Sep 18, 2018·1 cites·19 claims
- 2775USD716239SUpper chamber linerAPPLIED MATERIALS INC·Filed 2013·Granted Oct 28, 2014·19 cites·1 claims
- 2874US11361939B2Semiconductor processing chamber for multiple precursor flowAPPLIED MATERIALS INC·Filed 2019·Granted Jun 14, 2022·1 cites·15 claims
- 2973US9748121B2Thermal coupled quartz dome heat sinkAPPLIED MATERIALS INC·Filed 2014·Granted Aug 29, 2017·2 cites·15 claims
- 3072US11276590B2Multi-zone semiconductor substrate supportsAPPLIED MATERIALS INC·Filed 2017·Granted Mar 15, 2022·1 cites·20 claims
- 3171US9230837B2Multizone control of lamps in a conical lamphead using pyrometersAPPLIED MATERIALS INC·Filed 2014·Granted Jan 5, 2016·1 cites·20 claims
- 3271USD716240SLower chamber linerAPPLIED MATERIALS INC·Filed 2013·Granted Oct 28, 2014·16 cites·1 claims
- 3370US11515179B2Semiconductor processing chamber multistage mixing apparatusAPPLIED MATERIALS INC·Filed 2020·Granted Nov 29, 2022·0 cites·20 claims
- 3469US10356848B2Lamp heating for process chamberAPPLIED MATERIALS INC·Filed 2016·Granted Jul 16, 2019·1 cites·16 claims
- 3569USD711331SUpper chamber linerAPPLIED MATERIALS INC·Filed 2013·Granted Aug 19, 2014·15 cites·1 claims
- 3668US10781533B2Batch processing chamberAPPLIED MATERIALS INC·Filed 2016·Granted Sep 22, 2020·1 cites·20 claims
- 3767US9279604B2Compact ampoule thermal management systemAPPLIED MATERIALS INC·Filed 2013·Granted Mar 8, 2016·0 cites·19 claims
- 3867US2014137801A1Epitaxial chamber with customizable flow injectionAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 3967US2018209043A1Epitaxial chamber with customizable flow injectionAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 4066US10829855B2Gas distribution showerhead for semiconductor processingAPPLIED MATERIALS INC·Filed 2017·Granted Nov 10, 2020·0 cites·20 claims
- 4158US10453733B2Substrate transfer mechanismsAPPLIED MATERIALS INC·Filed 2018·Granted Oct 22, 2019·0 cites·20 claims
- 4258US2015020734A1Structure for improved gas activation for cross-flow type thermal cvd chamberAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 4358US2015083046A1Carbon fiber ring susceptorAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 4457US2014326185A1Inject and exhaust design for epi chamber flow manipulationAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 4555US2014026816A1Multi-zone quartz gas distribution apparatusAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 4652US2018138031A1Process chamber having separate process gas and purge gas regionsAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 4751US2017338135A1Thermal coupled quartz dome heat sinkAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 4850US2018005856A1Quartz upper and lower domesAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 4949US10837121B2Susceptor supportAPPLIED MATERIALS INC·Filed 2017·Granted Nov 17, 2020·0 cites·14 claims
- 5047US2016071749A1Upper dome for epi chamberAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
Showing the top 50 of 61 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →