Quartz upper and lower domes

Abstract

Embodiments of the invention relate to a dome assembly. The dome assembly includes an upper dome comprising a central window, and an upper peripheral flange engaging the central window at a circumference of the central window, wherein a tangent line on an inside surface of the central window that passes through an intersection of the central window and the upper peripheral flange is at an angle of about 8° to about 16° with respect to a planar upper surface of the peripheral flange, a lower dome comprising a lower peripheral flange and a bottom connecting the lower peripheral flange with a central opening, wherein a tangent line on an outside surface of the bottom that passes through an intersection of the bottom and the lower peripheral flange is at an angle of about 8° to about 16° with respect to a planar bottom surface of the lower peripheral flange.

1 . A lamphead assembly, comprising:
 a plurality of lamp assemblies;   a lamphead having a plurality of lamphead positions, each lamphead position securing a first end of one lamp assembly; and   a plurality of flexible standoffs, each flexible standoff attaching to a second end of one lamp assembly, wherein each flexible standoff comprises:
 a socket; and 
 an adaptor coupled to the socket. 
   
     
     
         2 . The lamphead assembly of  claim 1 , wherein the plurality of flexible standoffs are varying in length along a radial direction from a center of the lamphead assembly to an edge of the lamphead assembly. 
     
     
         3 . The lamphead assembly of  claim 1 , wherein each of the plurality of lamp assemblies comprises a lamp bulb and a lamp base connecting to the lamp bulb. 
     
     
         4 . The lamphead assembly of  claim 3 , wherein each lamp base has the same length. 
     
     
         5 . The lamphead assembly of  claim 1 , wherein one or more of the flexible standoffs have a curved shape. 
     
     
         6 . The lamphead assembly of  claim 3 , wherein each of the plurality of flexible standoffs is composed of a conductive component operable to transit power to the lamp bulb. 
     
     
         7 . The lamphead assembly of  claim 6 , wherein the conductive component is surrounded by a non-conductive housing. 
     
     
         8 . The lamphead assembly of  claim 1 , wherein the plurality of lamphead positions are arranged in multiple concentric circles. 
     
     
         9 . The lamphead assembly of  claim 1 , wherein each of the plurality of lamp assemblies comprises a solid state radiation source. 
     
     
         10 . A lamphead assembly, comprising:
 a plurality of lamp assemblies;   a lamphead having a plurality of lamphead positions for securing the plurality of lamp assemblies;   a plurality of flexible standoffs attached to the plurality of lamp assemblies, each flexible standoff comprising:
 a socket disposed at a first end of the flexible standoff; and 
 an adaptor coupled to the socket, the adapter extending through the flexible standoff from the first end of the flexible standoff to a second end of the flexible standoff opposing the first end; and 
   a power distribution board having one or more connection slots, the one or more connection slots connecting to one or more lamp assemblies through the plurality of flexible standoffs.   
     
     
         11 . The lamphead assembly of  claim 10 , wherein the plurality of lamphead positions increase in depth along a radial direction from a center of the lamphead assembly to an edge of the lamphead assembly. 
     
     
         12 . The lamphead assembly of  claim 10 , wherein the plurality of flexible standoffs are varying in length along a radial direction from a center of the lamphead assembly to an edge of the lamphead assembly. 
     
     
         13 . The lamphead assembly of  claim 10 , wherein each of the plurality of lamp assemblies comprises a lamp bulb and a lamp base connecting to the lamp bulb, and each lamp base has the same length. 
     
     
         14 . The lamphead assembly of  claim 13 , wherein the lamphead is operable to cool the lamp base. 
     
     
         15 . The lamphead assembly of  claim 10 , wherein the plurality of lamphead positions are arranged in multiple concentric circles. 
     
     
         16 . An apparatus for processing a substrate, comprising:
 a processing chamber, comprising:
 an upper dome; 
 a lower dome disposed opposing the upper dome; 
 a base ring disposed between the upper dome and the lower dome, the upper dome, the base ring and the lower dome defining a processing region of the processing chamber; and 
 one or more gas inlets disposed at a sidewall of the base ring; 
   a substrate support disposed within the processing region;   a lamphead positioned proximate to the lower dome;   a plurality of lamp assemblies, each lamp assembly comprising:
 a radiation source; and 
 a lamp base connecting to the radiation source; 
   a plurality of flexible standoffs attached to the plurality of lamp assemblies, each flexible standoff comprising:
 a socket; and 
 an adaptor coupled to the socket; and 
   a power distribution board comprising one or more connection slots, the one or more connection slots connecting to the one or more lamp assemblies through the plurality of flexible standoffs.   
     
     
         17 . The apparatus of  claim 16 , further comprising:
 a spacer disposed on the power distribution board.   
     
     
         18 . The apparatus of  claim 17 , wherein each flexible standoff further comprises a lip protruded outwardly from an outer surface of the flexible standoff, the lip interacting with the spacer. 
     
     
         19 . The apparatus of  claim 16 , wherein the plurality of flexible standoffs are varying in length along a radial direction from a center of the lamphead to an edge of the lamphead. 
     
     
         20 . The apparatus of  claim 16 , wherein each of the plurality of flexible standoffs is composed of a conductive component, and the conductive component is surrounded by a non-conductive housing.