Inventor · disambiguated record
Paul Brillhart
Also filed as: BRILLHART PAUL · BRILLHART PAUL L · BRILLHART PAUL LUKAS
59 granted patents·27 pending applications·986 citations·filing 2000–2025
99Inventor score
Files withAPPLIED MATERIALS INC68BUCHBERGER JR DOUGLAS A6BRILLHART PAUL LUKAS5RANISH JOSEPH M2BERA KALLOL1
Top patents by PatentIndex Score
86 records- 0198US8231799B2Plasma reactor apparatus with multiple gas injection zones having time-changing separate configurable gas compositions for each zoneBERA KALLOL·Filed 2006·Granted Jul 31, 2012·557 cites·18 claims
- 0296US8092639B2Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changesBUCHBERGER JR DOUGLAS A·Filed 2010·Granted Jan 10, 2012·20 cites·7 claims
- 0396US8012304B2Plasma reactor with a multiple zone thermal control feed forward control apparatusAPPLIED MATERIALS INC·Filed 2006·Granted Sep 6, 2011·27 cites·11 claims
- 0496US7649729B2Electrostatic chuck assemblyAPPLIED MATERIALS INC·Filed 2007·Granted Jan 19, 2010·45 cites·19 claims
- 0594US8608900B2Plasma reactor with feed forward thermal control system using a thermal model for accommodating RF power changes or wafer temperature changesBUCHBERGER JR DOUGLAS A·Filed 2006·Granted Dec 17, 2013·18 cites·20 claims
- 0693US10062598B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2015·Granted Aug 28, 2018·7 cites·12 claims
- 0793US8329586B2Method of processing a workpiece in a plasma reactor using feed forward thermal controlBUCHBERGER JR DOUGLAS A·Filed 2010·Granted Dec 11, 2012·11 cites·18 claims
- 0893US8221580B2Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a control processor governing both loopsBUCHBERGER JR DOUGLAS A·Filed 2006·Granted Jul 17, 2012·14 cites·18 claims
- 0993US2025364306A1Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1092US9845550B2Upper dome with injection assemblyAPPLIED MATERIALS INC·Filed 2015·Granted Dec 19, 2017·7 cites·20 claims
- 1192US8980044B2Plasma reactor with a multiple zone thermal control feed forward control apparatusBRILLHART PAUL LUKAS·Filed 2010·Granted Mar 17, 2015·10 cites·19 claims
- 1292US8337660B2Capacitively coupled plasma reactor having very agile wafer temperature controlBUCHBERGER JR DOUGLAS A·Filed 2010·Granted Dec 25, 2012·12 cites·13 claims
- 1392US8021521B2Method for agile workpiece temperature control in a plasma reactor using a thermal modelAPPLIED MATERIALS INC·Filed 2006·Granted Sep 20, 2011·13 cites·19 claims
- 1491US8157951B2Capacitively coupled plasma reactor having very agile wafer temperature controlBUCHBERGER JR DOUGLAS A·Filed 2006·Granted Apr 17, 2012·18 cites·16 claims
- 1591US7988872B2Method of operating a capacitively coupled plasma reactor with dual temperature control loopsAPPLIED MATERIALS INC·Filed 2006·Granted Aug 2, 2011·19 cites·20 claims
- 1690US11853042B2Part, sensor, and metrology data integrationAPPLIED MATERIALS INC·Filed 2021·Granted Dec 26, 2023·2 cites·17 claims
- 1790US10930543B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2018·Granted Feb 23, 2021·4 cites·17 claims
- 1890US10202707B2Substrate processing system with lamphead having temperature managementAPPLIED MATERIALS INC·Filed 2013·Granted Feb 12, 2019·4 cites·18 claims
- 1990US8034180B2Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactorAPPLIED MATERIALS INC·Filed 2006·Granted Oct 11, 2011·14 cites·6 claims
- 2090US7431859B2Plasma etch process using polymerizing etch gases with different etch and polymer-deposition rates in different radial gas injection zones with time modulationAPPLIED MATERIALS INC·Filed 2006·Granted Oct 7, 2008·18 cites·16 claims
- 2189US8092638B2Capacitively coupled plasma reactor having a cooled/heated wafer support with uniform temperature distributionBRILLHART PAUL LUKAS·Filed 2006·Granted Jan 10, 2012·15 cites·9 claims
- 2289US7540971B2Plasma etch process using polymerizing etch gases across a wafer surface and additional polymer managing or controlling gases in independently fed gas zones with time and spatial modulation of gas contentAPPLIED MATERIALS INC·Filed 2006·Granted Jun 2, 2009·16 cites·19 claims
- 2388US8772055B1Multizone control of lamps in a conical lamphead using pyrometersRANISH JOSEPH M·Filed 2013·Granted Jul 8, 2014·6 cites·5 claims
- 2487US9322097B2EPI base ringAPPLIED MATERIALS INC·Filed 2013·Granted Apr 26, 2016·7 cites·14 claims
- 2587US8546267B2Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal controlBRILLHART PAUL LUKAS·Filed 2010·Granted Oct 1, 2013·5 cites·7 claims
- 2687US7541292B2Plasma etch process with separately fed carbon-lean and carbon-rich polymerizing etch gases in independent inner and outer gas injection zonesAPPLIED MATERIALS INC·Filed 2006·Granted Jun 2, 2009·12 cites·21 claims
- 2786US12400904B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2023·Granted Aug 26, 2025·0 cites·20 claims
- 2886US10883190B2Apparatus and methods for alignment of a susceptorAPPLIED MATERIALS INC·Filed 2015·Granted Jan 5, 2021·4 cites·16 claims
- 2985US12057339B2Bipolar electrostatic chuck to limit DC dischargeAPPLIED MATERIALS INC·Filed 2020·Granted Aug 6, 2024·1 cites·7 claims
- 3082US10119192B2EPI base ringAPPLIED MATERIALS INC·Filed 2016·Granted Nov 6, 2018·3 cites·15 claims
- 3182US9768043B2Quartz upper and lower domesAPPLIED MATERIALS INC·Filed 2013·Granted Sep 19, 2017·4 cites·19 claims
- 3282US9532401B2Susceptor support shaft with uniformity tuning lenses for EPI processAPPLIED MATERIALS INC·Filed 2014·Granted Dec 27, 2016·5 cites·17 claims
- 3382US8801893B2Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactorBRILLHART PAUL LUKAS·Filed 2010·Granted Aug 12, 2014·5 cites·16 claims
- 3481US10727093B2Light pipe window structure for low pressure thermal processesAPPLIED MATERIALS INC·Filed 2015·Granted Jul 28, 2020·3 cites·16 claims
- 3581US9580835B2Multizone control of lamps in a conical lamphead using pyrometersAPPLIED MATERIALS INC·Filed 2016·Granted Feb 28, 2017·2 cites·9 claims
- 3680US12131934B2Semiconductor substrate support leveling apparatusAPPLIED MATERIALS INC·Filed 2020·Granted Oct 29, 2024·1 cites·7 claims
- 3780US10269614B2Susceptor design to reduce edge thermal peakAPPLIED MATERIALS INC·Filed 2015·Granted Apr 23, 2019·3 cites·15 claims
- 3879US12062567B2Systems and methods for substrate support temperature controlAPPLIED MATERIALS INC·Filed 2020·Granted Aug 13, 2024·1 cites·14 claims
- 3978US9814099B2Substrate support with surface feature for reduced reflection and manufacturing techniques for producing sameAPPLIED MATERIALS INC·Filed 2014·Granted Nov 7, 2017·1 cites·20 claims
- 4077US9870919B2Process chamber having separate process gas and purge gas regionsRANISH JOSEPH M·Filed 2013·Granted Jan 16, 2018·3 cites·9 claims
- 4176US6406522B1Dual mode air treatment apparatus and methodGAS RES INST·Filed 2000·Granted Jun 18, 2002·24 cites·18 claims
- 4276US2025014934A1Bipolar electrostatic chuck to limit dc dischargeAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4375US11848226B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2021·Granted Dec 19, 2023·0 cites·7 claims
- 4475US10077508B2Multizone control of lamps in a conical lamphead using pyrometersAPPLIED MATERIALS INC·Filed 2017·Granted Sep 18, 2018·1 cites·19 claims
- 4575US2024061409A1Part, sensor, and metrology data integrationAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4674US10458040B2Upper dome with injection assemblyAPPLIED MATERIALS INC·Filed 2017·Granted Oct 29, 2019·1 cites·20 claims
- 4774US9842753B2Absorbing lamphead faceAPPLIED MATERIALS INC·Filed 2014·Granted Dec 12, 2017·2 cites·20 claims
- 4873US9748121B2Thermal coupled quartz dome heat sinkAPPLIED MATERIALS INC·Filed 2014·Granted Aug 29, 2017·2 cites·15 claims
- 4972US9570275B2Heated showerhead assemblyAPPLIED MATERIALS INC·Filed 2014·Granted Feb 14, 2017·0 cites·13 claims
- 5072US2025054797A1Semiconductor substrate support leveling apparatusAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
Showing the top 50 of 86 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →