Inventor · disambiguated record
Surajit Kumar
Also filed as: KUMAR SURAJIT
14 granted patents·8 pending applications·36 citations·filing 2010–2024
89Inventor score
Top patents by PatentIndex Score
22 records- 0196US11577358B2Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2020·Granted Feb 14, 2023·4 cites·21 claims
- 0287US9322097B2EPI base ringAPPLIED MATERIALS INC·Filed 2013·Granted Apr 26, 2016·7 cites·14 claims
- 0387US9267742B2Apparatus for controlling the temperature uniformity of a substrateBERA KALLOL·Filed 2010·Granted Feb 23, 2016·5 cites·19 claims
- 0484US2024157504A1Apparatus and method for cmp temperature controlAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0582US10119192B2EPI base ringAPPLIED MATERIALS INC·Filed 2016·Granted Nov 6, 2018·3 cites·15 claims
- 0682US9768043B2Quartz upper and lower domesAPPLIED MATERIALS INC·Filed 2013·Granted Sep 19, 2017·4 cites·19 claims
- 0782US8822876B2Multi-zoned plasma processing electrostatic chuck with improved temperature uniformityTAVASSOLI HAMID·Filed 2011·Granted Sep 2, 2014·5 cites·20 claims
- 0879US8629370B2Assembly for delivering RF power and DC voltage to a plasma processing chamberTAVASSOLI HAMID·Filed 2011·Granted Jan 14, 2014·5 cites·20 claims
- 0977US11919123B2Apparatus and method for CMP temperature controlAPPLIED MATERIALS INC·Filed 2021·Granted Mar 5, 2024·0 cites·19 claims
- 1077US10132003B2Heating modulators to improve epi uniformity tuningAPPLIED MATERIALS INC·Filed 2017·Granted Nov 20, 2018·2 cites·22 claims
- 1173US11769684B2Wafer heater with backside and integrated bevel purgeAPPLIED MATERIALS INC·Filed 2022·Granted Sep 26, 2023·0 cites·18 claims
- 1265US9248509B2Multi-zoned plasma processing electrostatic chuck with improved temperature uniformityTAVASSOLI HAMID·Filed 2014·Granted Feb 2, 2016·1 cites·16 claims
- 1364US11021790B2Liner for processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Jun 1, 2021·0 cites·15 claims
- 1461US10386126B2Apparatus for controlling temperature uniformity of a substrateAPPLIED MATERIALS INC·Filed 2016·Granted Aug 20, 2019·0 cites·20 claims
- 1558US2015083046A1Carbon fiber ring susceptorAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 1657US2021111059A1Wafer Heater With Backside And Integrated Bevel PurgeAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1754US11209398B2High quality factor embedded resonator wafersAPPLIED MATERIALS INC·Filed 2019·Granted Dec 28, 2021·0 cites·16 claims
- 1850US2018005856A1Quartz upper and lower domesAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 1947US2023167581A1Wafer edge temperature correction in batch thermal process chamberAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 2047US2023297740A1Uniform radiation heating control architectureAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2143US2014287170A1Reflective linersAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 2243US2016348276A1Process chamber with reflectorAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →