Inventor · disambiguated record
Shu-Kwan Lau
Also filed as: LAU SHU-KWAN · LAU SHU-KWAN DANNY
41 granted patents·42 pending applications·138 citations·filing 2013–2025
97Inventor score
Files withAPPLIED MATERIALS INC83
Top patents by PatentIndex Score
83 records- 0195US12163229B2Multi zone spot heating in EPIAPPLIED MATERIALS INC·Filed 2023·Granted Dec 10, 2024·1 cites·20 claims
- 0295US11821088B2Multi zone spot heating in EPIAPPLIED MATERIALS INC·Filed 2021·Granted Nov 21, 2023·2 cites·19 claims
- 0393US11261538B1In-situ temperature mapping for epi chamberAPPLIED MATERIALS INC·Filed 2020·Granted Mar 1, 2022·3 cites·19 claims
- 0491US11021795B2Multi zone spot heating in epiAPPLIED MATERIALS INC·Filed 2018·Granted Jun 1, 2021·4 cites·19 claims
- 0591US9553002B2Flow controlled liner having spatially distributed gas passagesAPPLIED MATERIALS INC·Filed 2014·Granted Jan 24, 2017·9 cites·16 claims
- 0690US11177144B2Wafer spot heating with beam width modulationAPPLIED MATERIALS INC·Filed 2019·Granted Nov 16, 2021·5 cites·20 claims
- 0789US10170342B2Flow controlled liner having spatially distributed gas passagesAPPLIED MATERIALS INC·Filed 2017·Granted Jan 1, 2019·4 cites·20 claims
- 0889US10047457B2EPI pre-heat ringAPPLIED MATERIALS INC·Filed 2014·Granted Aug 14, 2018·4 cites·15 claims
- 0989US9842748B2Flow controlled liner having spatially distributed gas passagesAPPLIED MATERIALS INC·Filed 2017·Granted Dec 12, 2017·4 cites·12 claims
- 1087US11680338B2Linear lamp array for improved thermal uniformity and profile controlAPPLIED MATERIALS INC·Filed 2020·Granted Jun 20, 2023·2 cites·14 claims
- 1187US9905454B2Substrate transfer mechanismsAPPLIED MATERIALS INC·Filed 2015·Granted Feb 27, 2018·4 cites·13 claims
- 1285US2025066918A1Multi zone spot heating in epiAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1383US9123765B2Susceptor support shaft for improved wafer temperature uniformity and process repeatabilityAPPLIED MATERIALS INC·Filed 2014·Granted Sep 1, 2015·5 cites·20 claims
- 1482US10760161B2Inject insert for EPI chamberAPPLIED MATERIALS INC·Filed 2014·Granted Sep 1, 2020·2 cites·13 claims
- 1582US9768043B2Quartz upper and lower domesAPPLIED MATERIALS INC·Filed 2013·Granted Sep 19, 2017·4 cites·19 claims
- 1682US9532401B2Susceptor support shaft with uniformity tuning lenses for EPI processAPPLIED MATERIALS INC·Filed 2014·Granted Dec 27, 2016·5 cites·17 claims
- 1782USD717746SLower chamber linerAPPLIED MATERIALS INC·Filed 2013·Granted Nov 18, 2014·26 cites·1 claims
- 1881US12261062B2Spot heating by moving a beam with horizontal rotary motionAPPLIED MATERIALS INC·Filed 2023·Granted Mar 25, 2025·0 cites·16 claims
- 1978US9814099B2Substrate support with surface feature for reduced reflection and manufacturing techniques for producing sameAPPLIED MATERIALS INC·Filed 2014·Granted Nov 7, 2017·1 cites·20 claims
- 2077US10132003B2Heating modulators to improve epi uniformity tuningAPPLIED MATERIALS INC·Filed 2017·Granted Nov 20, 2018·2 cites·22 claims
- 2177US2025201596A1Spot heating by moving a beam with horizontal rotary motionAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2276US2025101629A1Multi-layer epi chamber bodyAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2375US11807931B2Chamber injectorAPPLIED MATERIALS INC·Filed 2022·Granted Nov 7, 2023·0 cites·20 claims
- 2475USD716239SUpper chamber linerAPPLIED MATERIALS INC·Filed 2013·Granted Oct 28, 2014·19 cites·1 claims
- 2573US10770319B2EPI thickness tuning by pulse or profile spot heatingAPPLIED MATERIALS INC·Filed 2019·Granted Sep 8, 2020·1 cites·20 claims
- 2673US2025096045A1Substrate processing monitoringAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2773US2024318351A1Multi-thermal cvd chambers with shared gas delivery and exhaust systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2873US2024339342A1Epi chamber with full wafer laser heatingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2973US2025275015A1Epitaxial deposition chamberAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3071US11842907B2Spot heating by moving a beam with horizontal rotary motionAPPLIED MATERIALS INC·Filed 2020·Granted Dec 12, 2023·0 cites·13 claims
- 3171USD716240SLower chamber linerAPPLIED MATERIALS INC·Filed 2013·Granted Oct 28, 2014·16 cites·1 claims
- 3270US12324061B2Epitaxial deposition chamberAPPLIED MATERIALS INC·Filed 2021·Granted Jun 3, 2025·0 cites·20 claims
- 3370US11492704B2Chamber injectorAPPLIED MATERIALS INC·Filed 2019·Granted Nov 8, 2022·0 cites·20 claims
- 3470US2025361647A1Uv energy sources for processing chambers, and related apparatus and methodsAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3569USD711331SUpper chamber linerAPPLIED MATERIALS INC·Filed 2013·Granted Aug 19, 2014·15 cites·1 claims
- 3667US12493307B2Fast switching gas circuits and processing chambers, and related methods and apparatus, for gas stabilizationAPPLIED MATERIALS INC·Filed 2023·Granted Dec 9, 2025·0 cites·14 claims
- 3767US2014137801A1Epitaxial chamber with customizable flow injectionAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 3867US2025215566A1Process chamber gas supply improvementAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3967US2018209043A1Epitaxial chamber with customizable flow injectionAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 4067US2024018688A1Batch processing apparatus, systems, and related methods and structures for epitaxial deposition operationsAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 4167US2025270734A1Liners having flow openings, and related chamber kits, processing chambers, and methods for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4266US2025034707A1Combined reduced pressure -high vacuum processing chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4365US12492867B2Air shrouds with integrated heat exchangerAPPLIED MATERIALS INC·Filed 2022·Granted Dec 9, 2025·0 cites·14 claims
- 4465US12467144B2Methods of correlating zones of processing chambers, and related systems and methodsAPPLIED MATERIALS INC·Filed 2022·Granted Nov 11, 2025·0 cites·13 claims
- 4564US2024141493A1Single piece or two piece susceptorAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4663US12037701B2Multi-thermal CVD chambers with shared gas delivery and exhaust systemAPPLIED MATERIALS INC·Filed 2021·Granted Jul 16, 2024·0 cites·16 claims
- 4763US12033874B2EPI chamber with full wafer laser heatingAPPLIED MATERIALS INC·Filed 2020·Granted Jul 9, 2024·0 cites·20 claims
- 4863US2024021444A1Batch processing apparatus, systems, and related methods and structures for epitaxial deposition operationsAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 4963US2025231066A1Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamberAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 5062US12428731B2Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustabilityAPPLIED MATERIALS INC·Filed 2022·Granted Sep 30, 2025·0 cites·22 claims
Showing the top 50 of 83 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →